Study on structural properties of nanocrystalline silicon films

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 17, Issue 6, 1996, Pages 406-409

  Han, Weiqiang ^a   Han, Gaorong ^a   Ding, Zishang ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; FILMS; NANOSTRUCTURED MATERIALS;

HIGH RESOLUTION ELECTRON MICROSCOPY; NANOCRYSTALLINE SILICON FILMS;

SEMICONDUCTING SILICON;

EID: 0030157123     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)