An automated swept power supply for a langmuir probe

Journal of Electrical and Electronics Engineering, Australia

Volumn 16, Issue 2, 1996, Pages 91-96

  Duffey, B ^a   Cheetham, A ^a   Rayner, J ^a  

^a UNIVERSITY OF CANBERRA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED SWEPT POWER SUPPLY; DATA ACQUISITION CARD; LANGMUIR PROBE; PLASMA CONDITIONS;

COMPUTER CONTROL SYSTEMS; CURRENT VOLTAGE CHARACTERISTICS; DATA ACQUISITION; ELECTRIC CURRENT MEASUREMENT; ELECTRON DEVICES; MICROCOMPUTERS; OPERATIONAL AMPLIFIERS; PLASMAS; RESISTORS; VOLTAGE MEASUREMENT;

ELECTRIC POWER SUPPLIES TO APPARATUS;

EID: 0030156830     PISSN: 07252986     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Chen, F.F., Electric Probes, In Plasma Diagnostic Techniques, edited by Huddlestone, R.H. and Leonard, S.L., Academic Press (1965) pp113-117.
2. Hershkowitz, N., How Langmuir Probes Work, In Plasma Diagnostics, Vol 1, Discharge Parameters and Chemistry edited by Aucciello, O. and Flamm, D., Academic Press (1989) pp 113-181.
3. Fang, D., Williams, R.R. and Marcus, R.K., Design and Evaluation of a Computer Controlled Langmuir Probe System for Glow Discharges Plasma Diagnostics, J Anal Atomic Spec, 5 (1990) 569-573.
4. Sudit, I.D. and Woods R.C., A Workstation based Langmuir Probe system for Low-Pressure CD Plasmas, Rev Sci Instrum. 64 (1993) 2440-2448.
5. Hopkins, M.B., et al, Automatic Langmuir Probe Diagnostic, Rev Sci Instrum., 58 (1987) 475-476.
6. Spatenka, P., Studeny, R. and Suhr, H., Apparatus for Langmuir Probe Monitoring of Plasma during Deposition Processes, Meas. Sci. Technol., 3 (1992) 704-706.