Preferential sputtering and surface binding energy in metal silicides

Vacuum

Volumn 47, Issue 5, 1996, Pages 421-424

  Zaporozchenko, V I ^a   Stepanova, M G ^b   Vojtusik, S S ^a  

^a Res Ctr Surf Vacuum I   (Russian Federation)

^b KELDYSH INSTITUTE OF APPLIED MATHEMATICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; INTERFACIAL ENERGY; ION BOMBARDMENT; SPUTTERING;

METAL SILICIDES; PREFERENTIAL SPUTTERING; SPUTTERING YIELD RATIOS;

SILICON ALLOYS;

EID: 0030151572     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(96)00002-4     Document Type: Article

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