Etching of AC thin film electroluminescent devices

IEEE Transactions on Semiconductor Manufacturing

Volumn 9, Issue 2, 1996, Pages 241-248

  Stevens, Robert ^a   McClean, Ian P ^a   Craven, Marc R ^a  

^a NOTTINGHAM TRENT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LUMINESCENT DEVICES; PHOSPHORIC ACID; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; THIN FILMS;

AC THIN FILM ELECTROLUMINESCENT DEVICES; ETCHING RATES; ION BEAM ETCHING; SPUTTER ETCHING; WET CHEMICAL PROCESSING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030151215     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.492818     Document Type: Article

References (13)

1. C. B. Thomas and W. M. Cranton, "High efficiency ZnS:Mn ac thin film electroluminescent device structure," Appl. Phys. Lett, vol. 63, pp. 23-26, Dec. 1993.
2. R. Stevens, C. B. Thomas, and W. M. Cranton, "Enhancing the brightness of thin film electroluminescent displays by improving the emission process," IEEE Electron Device Lett., vol. 15, pp. 97-99, Mar. 1994.
3. C. N. King, R. E. Coovert, and W. A. Barrow, in Proc. Eurodisplay '87, 1987, pp. 14-17.
4. P. Thioulouse, R. Tueta, A. Izrael, and N. Duruy, in Proc. Eurodisplay '84, 1984, pp. 81-84.
5. N. Yamauchi, H. Kozawaguchi, O. Kogure, and B. Tsujiyama, "A multicolor thin film electroluminescent device with patteren phosphors;" SID Dig. 87, pp. 230-233, May 1987.
6. C. Brunel, N. Bouadma, and P. Le Berre, Eurodisplay '87, pp. 238-241, 1987.
7. Z. K. Kun, D. Leksell, P. R. Malmberg, J. Asar, and G. B. Brandt, "TFEL edge emitter array for optical image bar applications," SID Dig. 1986, pp. 270-272, May 1986.
8. R. E. Lee, "Microfabrication by ion-beam etching," J. Vac. Sci. Technol., vol. 16, no. 2, pp. 164-170, Mar./Apr. 1979.
9. W. R. Runyan and K. E. Bean, Semiconductor Integrated Circuit Processing Technology. Reading, MA: Addison-Wesley, 1990.
10. D. M. Manos and D. L. Flam, Plasma Etching, An Introduction. London: Academic, 1982.
11. S. J. Moss and A. Ledworth, The Chemistry of the Semiconductor Industry. Glasgow: Blackie, 1987.
12. B. Cockayne, B. Lent, J. S. Abell, and P. M. Marquis "Dislocations in yttrium orthoaluminate single crystals," J. Mat. Sci., vol. 10, pp. 1874-1878, Oct. 1975.
13. W. H. Pasner, Z. K. Kun, D. Leksell, and V. A. Toth, "Process for defining an array of pixels in a thin film electroluminescent emitter structure," U.S. Patent 4885 448, 1989.