Characteristics of spin-on ferroelectric SrBi2Ta2O9 thin film capacitors for ferroelectric random access memory applications

Journal of Materials Research

Volumn 11, Issue 5, 1996, Pages 1065-1068

  Chu, Peir Y ^a   Jones Jr , Robert E ^a   Zurcher, Peter ^a   Taylor, Deborah J ^a   Jiang, Bo ^a   Gillespie, Sherry J ^a   Lii, Y T ^a   Kottke, Mike ^b   Fejes, Peter ^b   Chen, Wei ^b  

^a MOTOROLA INC   (United States)

^b MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHARACTERIZATION; COATING TECHNIQUES; COERCIVE FORCE; FATIGUE OF MATERIALS; FERROELECTRIC DEVICES; FILM PREPARATION; POLARIZATION; REMANENCE; STOICHIOMETRY; STRONTIUM COMPOUNDS; THIN FILM DEVICES;

AUGER ANALYSIS; FATIGUE ENDURANCE; FERROELECTRIC RANDOM ACCESS MEMORY; SPIN COATING; SPIN ON FERROELECTRIC THIN FILM CAPACITOR; STOICHIOMETRY CONTROL;

CAPACITORS;

EID: 0030150270     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0133     Document Type: Article

References (17)

1. J. F. Scott and C. A. Paz de Araujo, Science 246, 1400 (1989).
2. R. Moazzami, P. D. Maniar, R. E. Jones, Jr., A. C. Campbell, and C. J. Mogab, VLSI Tech. Symp. Digest, 87 (1993).
3. P. K. Larsen, G. A. C. M. Spierings, R. Cuppens, and G. J. M. Dormans, Microelectron. Eng. 22, 53 (1993).
4. C. A. Paz de Araujo, J. D. Cuchiaro, M. C. Scott, and L. D. McMillan, International Patent Publication No. WO93/12542 (June 24, 1993).
5. K. Amanuma, T. Hase, and Y. Miyasaka, Appl. Phys. Lett. 66 (2), 221 (1995).
6. T. Sumi, N. Moriwaki, G. Nakane, T. Nakakuma, Y. Judai, Y. Uemoto, Y. Nagano, S. Hayashi, M. Azuma, T. Otsuki, G. Kano, J. D. Cuchiaro, M. C. Scott, L. D. McMillan, and C. A. Paz de Araujo, Integrated Ferroelectrics 6, 1 (1995).
7. R. E. Jones, Jr., P. Zurcher, B. Jiang, J. Z. Witowski, Y. T. Lü, P. Y. Chu, D. J. Taylor, and S. J. Gillespie, Integrated Ferroelectrics (1996, in press).
8. B. Aurivillius, Arkiv Kemi, 1, 463, 499 (1949).
9. G. A. Smolenskii, V. A. Isupov, and A. I. Agranovskaya, Sov. Phys. Solid State 3, 651 (1961).
10. G. A. Smolenskii, V. A. Isupov, and A. I. Agranovskaya. Sov. Phys. Solid State 1, 149 (1959).
11. S. E. Cummins and L. E. Cross, J. Appl. Phys. 39 (5), 2268 (1968).
12. B. Jaffe, W. R. Cook, Jr., and H. Jaffe, Piezoelectric Ceramics (Academic Press, New York, 1971).
13. E. C. Subbarao, J. Phys. Chem. Solids 23, 665 (1962).
14. P. Y. Chu, I. Campion, and R. C. Buchanan, J. Mater. Res. 8, 261 (1993).
15. C. A. Paz de Araujo, J. D. Cuchiaro, M. C. Scott, and L. D. McMillan, International Patent Publication No. WO 93/12538, June 1993.
16. P. Y. Chu and R. C. Buchanan, J. Mater. Res. 6, 1736 (1991).
17. R. E. Jones, Jr., P. Zurcher, P. Y. Chu, D. J. Taylor, Y. T. Lü, B. Jiang, P. D. Maniar, and S. J. Gillespie, Microelectron. Eng. (in press).