A 3D finite element analysis coupled to the impedance boundary condition for the magnetodynamic problem in radiofrequency plasma devices

IEEE Transactions on Magnetics

Volumn 32, Issue 3 PART 2, 1996, Pages 812-815

  Louai, F Z ^a   Benzerga, D ^a   Feliachi M ^a  

^a UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COOLING SYSTEMS; ELECTROMAGNETIC FIELDS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MAXWELL EQUATIONS; PROBLEM SOLVING; SKIN EFFECT; THREE DIMENSIONAL;

ELECTRIC SCALAR POTENTIAL; IMPEDANCE BOUNDARY CONDITION; INDUCTOR RING; MAGNETIC VECTOR POTENTIAL; METALLIC COOLING SYSTEM; RADIO FREQUENCY PLASMA DEVICES;

PLASMA DEVICES;

EID: 0030149089     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.497365     Document Type: Article

References (9)

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