Grain boundary structure of c-BN thin film synthesized by PVD method

Materials Transactions, JIM

Volumn 37, Issue 5, 1996, Pages 1122-1126

  Zhou, Wei Lie ^a   Ikuhara, Yuichi ^b   Suzuki, Tetsuya ^a  

^a JAPAN FINE CERAMICS CENTER   (Japan)

^b Toshiba Tungaloy Co Ltd   (Japan)

Author keywords

Cubic boron nitride; Hexagonal boron nitride; High resolution electron microscopy; Ion plating method; Orientation relationship; Thin film

Indexed keywords

COMPRESSIVE STRENGTH; CRYSTAL LATTICES; DIAMONDS; DIFFRACTION; GRAIN BOUNDARIES; GRAPHITE; NUCLEATION; SILICON; STRESSES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION;

COMPRESSIVE STRESS; HEXAGONAL BORON NITRIDE; MICRODIFFRACTION PATTERN;

CUBIC BORON NITRIDE;

EID: 0030148092     PISSN: 09161821     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans1989.37.1122     Document Type: Article

References (17)

1. L.Vel, G. Demazeau and J. Etourneau, Mater. Sci. Eng. BIO (1991), 149.
2. D.R. McKenzie, J.Vac.Sci. Technol. B 11 (1993), 1928.
3. DJ.Kester, K.S. Ailey, D.J. Lichtenwalner and R.F. Davis, International Conference on Metallurgical Coating and Thin Film, San Diego (1994) (in Press).
4. M. Murakawa and S.Watanabe, Surf. Coat. Technol. 43/44 (1990), 128.
5. D.R.Mackenzie, D.J.H. Cockayne, D.A. Muller, M. Murakawa, S. Miyaké, S. Watanabe and P.Fallon, J. Appl. Phys. 70 (1991), 3007.
6. S.Watanabe, S. Miyaké and M. Murakawa, Surf. Coat. Technol. 62 (1993), 558.
7. M.Murakawa, S. Watanabe and S. Miyaké, Diam. Films Technol. 1 (1991), 55.
8. (S)Y.Ikuhara, P.Pirouz, A.H. Heuer, S. Yadavalli and C.P. Flynn, Phil. Mag. A 70, (1994) 75.
9. R. Gieick and C.H. Perry, Phys. Rev. 146 (1966), 146.
10. PJ.Gieliss, S.S. Mitra, J. N. Plendl, R.D. Griffs, L.C. Mansur, R. Marshall and E.A. Pascoe, Phys. Rev. 155 (1967), 543.
11. P.Hirsch, A. Howie, R.B. Nicholson, D.W. Pashley and M.J. Whelan, Electron Microscopy of Thin Crystals (Krieger, New York) (1977).
12. J.C. Angus, W.A. Will and W.S. Stanko, J. Appl. Phys. 39 (1968), 2915.
13. B.V. Derjaguin, B. Spitsyn and L.L.Boulov, J. Cryst. Growth 2 (1968), 380.
14. W.R.L.Lambrecht, C.H.Lee, B. Segal, J.C. Angus Z.Li andM. Sunkara, Nature (London) 364 (1993), 607.
15. T. Suzuki, M.Yagi and K. Shibuki, Appl. Phys. Lett. 65 (1994), 540.
16. K.Kishi, Y. Ichida, M.Suzuki and I. Sugimoto, Jpn. New Diamond 10 (1994), 26.
17. S.Horiuchi, L.L. He and M. Akaishi (Submitted to Appl. Phys. Lett.) (1995).