Auger electron spectroscopy of aluminum nitride powder surfaces

Journal of the American Ceramic Society

Volumn 79, Issue 5, 1996, Pages 1213-1217

  Saito, Naruki ^a   Ishizaki, Kozo ^a,b  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; SURFACE PROPERTIES; SURFACE TESTING;

ALUMINUM NITRIDE;

ALUMINUM COMPOUNDS;

EID: 0030146134     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08574.x     Document Type: Article

References (29)

1. L. M. Sheppard, "Aluminum Nitride: A Versatile but Challenging Material," Am. Ceram. Soc. Bull., 69, 11, 1801-12 (1990).
2. G. A. Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, "The Intrinsic Thermal Conductivity of AlN," J. Phys. Chem. Solids, 48, 641-47 (1987).
3. A. V. Virkar, T. B. Jackson, and R. A. Cutler, "Thermodynamic and Kinetic Effects of Oxygen Removal on the Thermal Conductivity of Aluminum Nitride," J. Am. Ceram. Soc., 72 [11] 2031-42 (1989).
4. Y. Iwamoto, A. Kuibira, I. Sugiura, and J. Tsubaki, "Effect of Powder Properties on Thermal Conductivity of Aluminum Nitride," J. Ceram. Soc. Jpn., 100 [5] 652-56 (1992).
5. 3-AlN System"; pp. 111-15 in Progress in Nitrogen Ceramics. Edited by F. L. Riley. Martinus Nijhoff Publishers, Boston, MA, 1983.
6. S Hirai and H. Katayama, "Various Synthesis Process of Aluminum Nitride Powder - Mainly in Reference to Formation Mechanism," J. Jpn. Inst. Met., 29 [7] 534-41 (1990).
7. 2 Atmosphere," J. Am. Ceram. Soc., 76 [9] 2295-99 (1993).
8. See for example, A. W. Weimer, G. A. Cochran, G. A. Eisman, J. P. Henley, B. D. Hook, L. K. Mills, T. A. Guiton, A. K. Knudsen, N. R. Nicholas, J. E. Volmering, and W. G. Moore, "Rapid Process for Manufacturing Aluminum Nitride Powder," J. Am. Ceram. Soc., 77 [1] 3-18 (1994).
9. See for example, A. A. Adjaottor and G. L. Griffin, "Aerosol Synthesis of Aluminum Nitride Powder Using Metalorganic Reactants," J. Am. Ceram. Soc., 75 [12] 3209-14 (1992).
10. N. Kuramoto and H. Taniguchi, "Fine Aluminum Nitride Powder and Composition Based on It," Ger. Pat. No. DE3333406, Jpn. Pat. No. JP59/05008, 1984.
11. N. Saito, C. Ishizaki, and K. Ishizaki, "Temperature Programmed Desorption (TPD) Evaluation of Aluminum Nitride Powder Surfaces Produced by Different Manufacturing Processes," J. Ceram. Soc. Jpn., 102 [3] 301-304 (1994) (int. ed., 102, 299-302 (1994)).
12. N. Saito, C. Ishizaki, and K. Ishizaki, "Temperature Programmed Desorption (TPD) Evaluation of Aluminum Nitride Powder Surfaces Produced by Different Manufacturing Processes," J. Ceram. Soc. Jpn., 102 [3] 301-304 (1994) (int. ed., 102, 299-302 (1994)).
13. A. D. Katnani and K. I. Papathomas, "Kinetics and Initial Stages of Oxidation of Aluminum Nitride: Thermogravimetric Analysis and X-ray Photoelectron Spectroscopy Study," J. Vac. Sci. Technol. A, 5 [4] Jul/Aug, 1335-40 (1987).
14. J. G. Highfield and P. Brown, "Diffuse-Reflectance Fourier Transform Infrared Spectroscopic Studies of the Stability of Aluminum Nitride Powder in an Aqueous Environment," Anal. Chem., 61, 2399-402 (1989).
15. P. Brown, J. G. Highfield, A. Mocellin, and T. A. Ring, "Degradation of Aluminum Nitride Powder in an Aqueous Environment," J. Am. Ceram. Soc., 73 [3] 724-28 (1990).
16. H. M. Liao, R. N. S. Sodhi, and T. W. Coyle, "Surface Composition of AlN Powders Studied by X-ray Photoelectron Spectroscopy and BremsstrahlungExcited Auger Electron Spectroscopy," J. Vac. Sci. Technol. A, 11 [5] Sep/Oct, 2681-86 (1994).
17. G. E. Potter, A. K. Knudsen, and J. C. Tou, "Measurement of the Oxygen and Impurity Distribution in Polycrystalline Aluminum Nitride with Secondary Ion Mass Spectrometry," J. Am. Ceram. Soc., 75 [12] 3215-24 (1992).
18. H. Utsugi, A. Endo, N. Suzuki, and K. Ono, "The Surface-Treatment of Aluminum Nitride Exposed to the Atmosphere and Its Surface Property," Chem. Soc. Jpn., 1985 [6] 1265-69 (1985).
19. E. Ponthieu, P. Grange, B. Delmon, L. Lonnoy, L. Leclercq, R. Bechara, and J. Grimblot, "Proposal of a Composition Model for Commercial AlN Powders," J. Eur. Ceram. Soc., 8, 233-41 (1991).
20. T. A. Guiton, J. E. Volmering, and K. K. Killinger, "Optimization of Aluminum Nitride Thermal Conductivity via Controlled Powder Processing," Mater. Res. Soc. Symp. Proc., 271, 851-56 (1992).
21. I. V. Nicolaescu, G. Tardos, and R. E. Riman, "Thermogravimetric Determination of Carbon, Nitrogen, and Oxygen in Aluminum Nitride," J. Am. Ceram. Soc., 77 [9] 2265-72 (1994).
22. N. Lieske and R. Hezel, "Formation of Al-nitride Films at Room Temperature by Nitrogen Ion Implantation into Aluminum," J. Appl. Phys., 52 [9] Sept., 5806-10 (1981).
23. 1-x Thin Films," J. Vac. Sci. Technol. A, 10 [1] Jan/Feb, 137-44 (1992).
24. A. Hoffman, Ts. Maniv, and M. Folman, "Auger and XP Spectra of Oxygen Adsorbed on Al(100), Relaxation Energies and the Nature of the Adsorbed Layer," Surf. Sci., 182, 56-68 (1987).
25. A. Hoffman, Ts. Maniv, and M. Folman, "AES and XPS Studies of No Adsorption on Al(100) Single Crystal," Surf. Sci., 183, 484-502 (1987).
26. J. A. Kovacich, J. Kasperkiewicz, D. Lichtman, and C. R. Aita, "Auger Electron and X-ray Photoelectron Spectroscopy of Sputter Deposited Aluminum Nitride," J. Appl. Phys., 55 [8] 15 April, 2935-39 (1984).
27. M. Sternitzke and G. Muller, "EELS Study of Oxygen Diffusion in Aluminum Nitride," J. Am. Ceram. Soc., 77 [3] 737-42 (1994).
28. 23 Oxygen Auger Lines in Different Compounds," Solid State Commun., 31, 347-49 (1979).
29. L. Pauling, The Nature of the Chemical Bond, 3rd ed. Cornell University Press, Ithaca, NY, 1960.