Formation of Ge nanocrystals in amorphous GeOx and SiGeOx alloy films

Thin Solid Films

Volumn 278, Issue 1-2, 1996, Pages 32-36

  Zacharias, M ^a   Blasing J ^a   Lohmann M ^a   Christen, J ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Alloys; Annealing; Germanium; Nanostructures

Indexed keywords

ANNEALING; FILM PREPARATION; GERMANIUM; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING FILMS; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; X RAY ANALYSIS;

AMORPHOUS ALLOY FILMS; GRAZING INCIDENCE; X RAY SCATTERING;

AMORPHOUS FILMS;

EID: 0030145830     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08133-X     Document Type: Article

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