Piezoelectrically driven rotary stage for use in ultrahigh vacuum

Review of Scientific Instruments

Volumn 67, Issue 5, 1996, Pages 1930-1934

  De Haas, E ^a   Barsingerhorn, W ^a   Van Der Veen, J F ^a  

^a FOM INSTITUTE AMOLF   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CLAMPING DEVICES; COATINGS; ELECTRIC WAVEFORMS; GONIOMETERS; HINGES; ROTATION; TESTING; TORQUE; VACUUM; WEAR RESISTANCE; X RAY DIFFRACTION;

CATCHING ELEMENT; ELASTIC HINGE; PIEZOELECTRICALLY DRIVEN ROTARY STAGE; PIEZOSTACKS; ULTRAHIGH VACUUM;

PIEZOELECTRIC DEVICES;

EID: 0030145424     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146999     Document Type: Article

References (15)

1. See, for example, Y. Kuk and P. J. Silverman, Rev. Sci. Instrum. 60, 165 (1989).
2. R. M. Tromp and M. C. Reuter, Ultramicroscopy 30, 99 (1991).
3. J. D. Skipper, U. S. Patent No. 5027028 A.
4. D. W. Pohl, Rev. Sci. Instrum. 58, 54 (1987).
5. Ch. Gerber, G. Binnig, H. Fuchs, and H. Rohrer, Rev. Sci. Instrum. 57, 221 (1986).
6. Catalogue of inchworms® and The Micropositioning Book, from Burleigh Instruments Inc., Burleigh, Fishers, NY.
7. Patent pending.
8. The kappa-axis geometry has originally been developed for the CAD-4 diffractometer manufactured by B. V. Enraf-Nonius, Delft, The Netherlands. Recently, a high-speed kappa goniometer with in-air circles has been built by I. K. Robinson et al. for x-ray diffraction studies at the synchrotron radiation source NSLS (Brookhaven), see Synchrotron. Radiat. News 7, 5 (1994).
9. See, for example, R. Feidenhans'l, Surf. Sci. Rep. 10, 105 (1989).
10. M. Lohmeier and E. Vlieg, J. Appl. Cryst. 26, 706 (1993).
11. Precision ball bearing S1721 MR5 P712 LDD DB4/6 with dicronite coating, MPB Corp., Keene, NH.
12. Hardiff B. V., P.O. Box 65, 7360 AB Beekbergen, The Netherlands.
13. Clamper and pusher piezostacks are of the low-voltage-type P-915.425 (UHV option), Physik Instrumente (PI) GmbH and Co., Waldbronn, Germany.
14. Clamper piezostack is of the high-voltage-type P-178.10 (UHV option), pusher piezostack is of the high-voltage type P-249.10 (UHV option), Physik Instrumente (PI) GmbH and Co., Waldbronn, Germany.
15. Heidenhain GmbH, Traunreut, Germany.