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Volumn 277, Issue 1-2, 1996, Pages 155-161
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On some important care to take when making spectrophotometric measurements on semiconductor thin films
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Author keywords
Optical properties; Semiconductors; Sputtering; Surface defects
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Indexed keywords
ABSORPTION;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
CRYSTAL DEFECTS;
MATHEMATICAL MODELS;
SPECTROPHOTOMETERS;
SPECTROPHOTOMETRY;
SPUTTERING;
THIN FILMS;
TRANSPARENCY;
FILM THICKNESS;
INTERFERENCE SPECTRAL FRINGES;
OPTICAL CONSTANTS;
SEMICONDUCTOR THIN FILMS;
SURFACE DEFECTS;
THICK AMORPHOUS SILICON FILMS;
SEMICONDUCTING FILMS;
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EID: 0030143520
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(95)08004-X Document Type: Article |
Times cited : (10)
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References (15)
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