Ion beam assisted deposition induced composition changes in titanium nitride

Physica Status Solidi (A) Applied Research

Volumn 155, Issue 1, 1996, Pages 181-188

  Gerlach, J W ^a   Wengenmair, H ^a   Hartmann, J ^a   Assmann, W ^b   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION BEAMS; ION BOMBARDMENT; TITANIUM NITRIDE;

ELASTIC RECOIL DETECTION ANALYSIS; ION BEAM ASSISTED DEPOSITION; TITANIUM NITRIDE FILMS;

CHEMICAL VAPOR DEPOSITION;

EID: 0030143293     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211550116     Document Type: Article

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