메뉴 건너뛰기




Volumn 79, Issue 5, 1996, Pages 1351-1360

Thermodynamics of the Si-O-N system: I. High-temperature study of the vaporization behavior of silicon nitride by mass spectrometry

Author keywords

[No Author keywords available]

Indexed keywords

ENTHALPY; HIGH TEMPERATURE PROPERTIES; MASS SPECTROMETRY; SILICON COMPOUNDS; THERMODYNAMIC PROPERTIES; VAPORIZATION;

EID: 0030143018     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08596.x     Document Type: Article
Times cited : (44)

References (41)
  • 1
    • 51249177992 scopus 로고
    • The N‐Si (Nitrogen‐Silicon) System
    • 1 O. N. Carlson, “ The N‐Si (Nitrogen‐Silicon) System,” Bull. Alloy Phase Diagrams, 11 [ 6 ] 569–73 (1990).
    • (1990) Bull. Alloy Phase Diagrams , vol.11 , Issue.6 , pp. 569-73
    • Carlson, O.N.1
  • 2
    • 85120516438 scopus 로고
    • Thermodynamic Properties of Individual Substances
    • 2 L. V. Gurvich, I. V. Veyts, and C. B. Alcock (Eds.), Thermodynamic Properties of Individual Substances, 4th ed. ; Vol. 2, Part I, pp. 241,243, 295–98 ; Part II, pp. 261–62. Hemisphere, New York, 1990.
    • (1990) , vol.2 , pp. 295-98
  • 4
    • 85120516745 scopus 로고
    • Thermodynamics of Silicon Nitride and Oxynitride, in: Nitrogen Ceramics
    • 4 A. Hendry, “ Thermodynamics of Silicon Nitride and Oxynitride ”; pp. 183–85 in Nitrogen Ceramics. Edited by F. L. Riley. Int. Publishing, Reading, MA, 1977.
    • (1977) , pp. 183-85
    • Hendry, A.1
  • 5
    • 0006450774 scopus 로고
    • High Temperature Thermodynamics of the Silicon, Nitrogen, Silicon‐Nitride System
    • 5 R. D. Pehlke and J. F. Elliott, “ High Temperature Thermodynamics of the Silicon, Nitrogen, Silicon‐Nitride System,” Trans. Metall. Soc. AIME, 215, 781–85 (1959).
    • (1959) Trans. Metall. Soc. AIME , vol.215 , pp. 781-85
    • Pehlke, R.D.1    Elliott, J.F.2
  • 6
    • 0011258971 scopus 로고
    • The Thermodynamics and Kinetics of Formation of Phases in the Ge‐N‐O and Si‐N‐O Systems, in: Special Ceramics 5
    • 6 S. Wild, P. Grieveson, and K. H. Jack, “ The Thermodynamics and Kinetics of Formation of Phases in the Ge‐N‐O and Si‐N‐O Systems ”; pp. 271–87 in Special Ceramics 5. Edited by P. Popper. British Ceramic Research Association, Stoke‐on‐Trent, U.K., 1970.
    • (1970) , pp. 271-87
    • Wild, S.1    Grieveson, P.2    Jack, K.H.3
  • 7
    • 0000061716 scopus 로고
    • Thermodynamics of the Silicon‐Nitrogen‐Oxygen System
    • 7 I. Colquhoun, S. Wild, P. Grieveson, and K. H. Jack, “ Thermodynamics of the Silicon‐Nitrogen‐Oxygen System,” Proc. Br. Ceram. Soc., 22, 207–27 (1973).
    • (1973) Proc. Br. Ceram. Soc. , vol.22 , pp. 207-27
    • Colquhoun, I.1    Wild, S.2    Grieveson, P.3    Jack, K.H.4
  • 8
    • 0001480592 scopus 로고
    • Equilibria and Kinetics in the Systems Si‐N and Si‐N‐O, in: Special Ceramics 6
    • 8 K. Blegen, “ Equilibria and Kinetics in the Systems Si‐N and Si‐N‐O ”; pp. 223–44 in Special Ceramics 6. Edited by P. Popper. British Ceramic Research Association, Stoke‐on‐Trent, U.K., 1975.
    • (1975) , pp. 223-44
    • Blegen, K.1
  • 9
    • 0002846095 scopus 로고
    • Free‐Evaporation and Effusion Techniques, in: The Characterization of High Temperature Vapors
    • 9 R. C. Paule and J. L. Margrave, “ Free‐Evaporation and Effusion Techniques ”; pp. 130–51 in The Characterization of High Temperature Vapors. Edited by J. L. Margrave. Wiley, New York, 1967.
    • (1967) , pp. 130-51
    • Paule, R.C.1    Margrave, J.L.2
  • 10
    • 0000426183 scopus 로고
    • Evaporation from Solids, in: Treatise on Solid‐State Chemistry, Vol. 6A, Surfaces I
    • 10 G. M. Rosenblatt, “ Evaporation from Solids ”; pp. 165–240 in Treatise on Solid‐State Chemistry, Vol. 6A, Surfaces I. Edited by N. B. Hannay. Plenum Press, New York, 1976.
    • (1976) , pp. 165-240
    • Rosenblatt, G.M.1
  • 12
    • 0041402933 scopus 로고
    • Evaporation and Thermodynamic Properties of Silicon Nitride
    • 12 E. A. Ryklis, A. S. Bolgar, and V. V. Fesenko. Evaporation and Thermodynamic Properties of Silicon Nitride,” Poroshk. Metall., 1 [ 73 ] 92–96 (Engl. transl. pp. 73–76) (1969).
    • (1969) Poroshk. Metall. , vol.1 , Issue.73 , pp. 92-96
    • Ryklis, E.A.1    Bolgar, A.S.2    Fesenko, V.V.3
  • 13
    • 0343453935 scopus 로고
    • Mass Spectrometry Applied to High Temperature Chemistry, in: Proceedings of an International Symposium on High Temperature Technology
    • 13 M. G. Inghram and J. Drowart, “ Mass Spectrometry Applied to High Temperature Chemistry ”; pp. 219–40 in Proceedings of an International Symposium on High Temperature Technology. McGraw‐Hill, New York, 1959.
    • (1959) , pp. 219-40
    • Inghram, M.G.1    Drowart, J.2
  • 14
    • 0041943633 scopus 로고
    • Mass Spectrometric Studies of the Vaporization of Inorganic Substances at High Temperaures, in: Condensation and Evaporation of Solids
    • 14 J. Drowart, “ Mass Spectrometric Studies of the Vaporization of Inorganic Substances at High Temperaures ”; pp. 255–310 in Condensation and Evaporation of Solids. Edited by E. Rutner, P. Goldfinger, and J. P. Hirth. Gordon and Breach, New York, 1962.
    • (1962) , pp. 255-310
    • Drowart, J.1
  • 15
    • 0012473578 scopus 로고
    • Thermodynamic and PhysicoChemical Behavior of the Interactions Between Knudsen Effusion Cells and the Systems Under Investigation. Analysis by High Temperature Mass Spectrometry, in: Characterization of High Temperature Vapors and Gases
    • 15 C. Chatillon, M. Allibert, and A. Pattoret, “ Thermodynamic and PhysicoChemical Behavior of the Interactions Between Knudsen Effusion Cells and the Systems Under Investigation. Analysis by High Temperature Mass Spectrometry ”; pp. 181–210 in NBS Special Publication (U.S.), No. 561/1, Characterization of High Temperature Vapors and Gases. Edited by J. Hastie. U.S. Department of Commerce, Washington, DC, 1979.
    • (1979) , pp. 181-210
    • Chatillon, C.1    Allibert, M.2    Pattoret, A.3
  • 16
    • 0010164237 scopus 로고
    • Multiple Knudsen Cells for High Temperature Mass Spectrometry: Improvements and Applications to the Study of Condensed Phases
    • 16 C. Chatillon, M. Allibert, and A. Pattoret, “ Multiple Knudsen Cells for High Temperature Mass Spectrometry: Improvements and Applications to the Study of Condensed Phases,” Adv. Mass Spectrom., 7A, 615–21 (1978).
    • (1978) Adv. Mass Spectrom. , vol.7A , pp. 615-21
    • Chatillon, C.1    Allibert, M.2    Pattoret, A.3
  • 17
    • 0018295389 scopus 로고
    • Mass Spectrometry Measurements of Activities in Liquid Ag‐Ge Alloys: Critical Assessment of the Thermodynamics of the Ag‐Ge System and Short Distance Order
    • 17 L. Martin‐Garin, C. Chatillon, and M. Allibert, “ Mass Spectrometry Measurements of Activities in Liquid Ag‐Ge Alloys: Critical Assessment of the Thermodynamics of the Ag‐Ge System and Short Distance Order,” J. Less-Common Met., 63, 9–23 (1979).
    • (1979) J. Less-Common Met. , vol.63 , pp. 9-23
    • Martin‐Garin, L.1    Chatillon, C.2    Allibert, M.3
  • 18
    • 84987367616 scopus 로고
    • Thermodynamic Activities in the Cubic Phase Ti‐O‐N by High‐Temperature Mass Spectrometry
    • 18 B. Granier, C. Chatillon, and M. Allibert, “ Thermodynamic Activities in the Cubic Phase Ti‐O‐N by High‐Temperature Mass Spectrometry,” J. Am. Ceram. Soc., 65 [ 10 ] 465–69 (1982).
    • (1982) J. Am. Ceram. Soc. , vol.65 , Issue.10 , pp. 465-69
    • Granier, B.1    Chatillon, C.2    Allibert, M.3
  • 19
    • 0001987545 scopus 로고    scopus 로고
    • Vapor Pressure and Evaporation Coefficient of SiO (Amorphous) and SiO2(s) + Si(s) Mixtures by the Multiple Knudsen Cell Mass Spectrometric Method
    • 19 Ph. Rocabois, C. Chatillon, and C. Bernard, “ Vapor Pressure and Evaporation Coefficient of SiO (Amorphous) and SiO 2 (s) + Si(s) Mixtures by the Multiple Knudsen Cell Mass Spectrometric Method,” Rev. Int. Hautes Temp. Refract., 28, 37–48 (199293).
    • Rev. Int. Hautes Temp. Refract. , vol.28 , pp. 37-48
    • Rocabois, Ph.1    Chatillon, C.2    Bernard, C.3
  • 20
    • 0000364584 scopus 로고
    • The Thermal Decomposition of Sodium Carbonate by the Effusion Method
    • 20 K. Motzfeld, “ The Thermal Decomposition of Sodium Carbonate by the Effusion Method, “ J. Phys. Chem., 59 [ 4 ] 139–47 (1995).
    • (1995) J. Phys. Chem. , vol.59 , Issue.4 , pp. 139-47
    • Motzfeld, K.1
  • 21
    • 0002579070 scopus 로고
    • High Temperature Thermodynamic Studies by Mass Spectrometry: Effect of Surface Evaporation Contributions on the Representativity of Molecular Beam Sampling
    • 21 C. Chatillon, M. Allibert, and A. Pattoret, “ High Temperature Thermodynamic Studies by Mass Spectrometry: Effect of Surface Evaporation Contributions on the Representativity of Molecular Beam Sampling,” High Temp. Sci., 8, 233–55 (1976).
    • (1976) High Temp. Sci. , vol.8 , pp. 233-55
    • Chatillon, C.1    Allibert, M.2    Pattoret, A.3
  • 22
    • 85120515633 scopus 로고    scopus 로고
    • Thermodynamics of the Si‐C System. I. Mass Spectrometric Studies of the Condensed Phases at High Temperature
    • 22 Ph. Rocabois, C. Chatillon, and C. Bernard, “ Thermodynamics of the Si‐C System. I. Mass Spectrometric Studies of the Condensed Phases at High Temperature,” High Temp.—High Pressures, in press.
    • Rocabois, Ph.1    Chatillon, C.2    Bernard, C.3
  • 23
    • 22244481940 scopus 로고
    • Measurements of the Electron Impact lonization Cross Sections of He, C, O, and N Atoms
    • 23 E. Brook, M. F. A. Harrison, and A. C. H. Smith, “ Measurements of the Electron Impact lonization Cross Sections of He, C, O, and N Atoms,” J. Phys. B, 11 [ 17 ] 3115–32 (1978).
    • (1978) J. Phys. B , vol.11 , Issue.17 , pp. 3115-32
    • Brook, E.1    Harrison, M.F.A.2    Smith, A.C.H.3
  • 24
    • 0000333784 scopus 로고
    • Cross‐Section Measurements for Electron‐Impact lonization of Atoms
    • 24 R. S. Freund, R. C. Wetzel, R. J. Shul, and T. R. Hayes, “ Cross‐Section Measurements for Electron‐Impact lonization of Atoms,” Phys. Rev., A41 [ 7 ] 3575–95 (1990).
    • (1990) Phys. Rev. , vol.A41 , Issue.7 , pp. 3575-95
    • Freund, R.S.1    Wetzel, R.C.2    Shul, R.J.3    Hayes, T.R.4
  • 25
    • 85120510193 scopus 로고    scopus 로고
    • 25 J. W. Hastie, private communication from Maun's original data.
    • Hastie, J.W.1
  • 26
    • 33947463752 scopus 로고
    • Cross Sections of Molecules for lonization by Electrons
    • 26 J. W. Otvos and D. P. Stevenson, “ Cross Sections of Molecules for lonization by Electrons,” J. Am. Ceram. Soc., 78, 546–51 (1956).
    • (1956) J. Am. Ceram. Soc. , vol.78 , pp. 546-51
    • Otvos, J.W.1    Stevenson, D.P.2
  • 27
    • 84981769654 scopus 로고
    • Investigation of Inorganic Systems at High Temperature by Mass Spectrometry
    • 27 J. Drowart and P. Goldfinger, “ Investigation of Inorganic Systems at High Temperature by Mass Spectrometry,” Angew. Chem., 6 [ 7 ] 581–648 (1967).
    • (1967) Angew. Chem. , vol.6 , Issue.7 , pp. 581-648
    • Drowart, J.1    Goldfinger, P.2
  • 28
    • 0344322435 scopus 로고
    • Thermodynamic Properties of Si3N4
    • 28 V. I. Koshchenko and Ya. Kh. Grinberg, “ Thermodynamic Properties of Si 3 N 4. Mater., 18 [ 6 ] 903–905 (1982).
    • (1982) Mater. , vol.18 , Issue.6 , pp. 903-905
    • Koshchenko, V.I.1    Grinberg, Ya. Kh.2
  • 29
    • 84952267241 scopus 로고
    • The Heat of Formation and the Specific Heat of Silicon Nitride
    • 29 S. Sato, “ The Heat of Formation and the Specific Heat of Silicon Nitride,” Bull. Chem. Soc. Jpn., 13, 41–48 (1938).
    • (1938) Bull. Chem. Soc. Jpn. , vol.13 , pp. 41-48
    • Sato, S.1
  • 31
    • 85120514850 scopus 로고    scopus 로고
    • Laboratoire de Thermodynamique et Microcalorimetric
    • 31 A. M. Zhara, Laboratoire de Thermodynamique et Microcalorimetric, CNRS, 13003 Marseille, France; private communication.
    • Zhara, A.M.1
  • 32
    • 33947085243 scopus 로고
    • Mass Spectrometric Evidence for the Gaseous Silicon Oxide Nitride Molecule and Its Heat of Atomization
    • 32 D. W. Muenow, “ Mass Spectrometric Evidence for the Gaseous Silicon Oxide Nitride Molecule and Its Heat of Atomization,” J. Phys. Chem., 77 [ 7 ] 970–71 (1973).
    • (1973) J. Phys. Chem. , vol.77 , Issue.7 , pp. 970-71
    • Muenow, D.W.1
  • 33
    • 85120515239 scopus 로고    scopus 로고
    • High Temperature Mass Spectrometry Using the Knudsen Effusion Cell. I. Optimization of Sampling Constraints on the Molecular Beam
    • 33 P. Morland, C. Chatillon, and Ph. Rocabois, “ High Temperature Mass Spectrometry Using the Knudsen Effusion Cell. I. Optimization of Sampling Constraints on the Molecular Beam ”; submitted to High Temp. Sci.
    • Morland, P.1    Chatillon, C.2    Rocabois, Ph.3
  • 34
    • 84975396000 scopus 로고
    • Interpretation of Knudsen Vapor‐Pressure Measurements on Porous Solids
    • 34 G. M. Rosenblatt, “ Interpretation of Knudsen Vapor‐Pressure Measurements on Porous Solids,” J. Electrochem. Soc., 110 [ 6 ] 563–69 (1963).
    • (1963) J. Electrochem. Soc. , vol.110 , Issue.6 , pp. 563-69
    • Rosenblatt, G.M.1
  • 35
    • 0344020429 scopus 로고
    • Chaleur de Formation de 1'Azoture de Silicium
    • 35 C. Matignon, “ Chaleur de Formation de 1'Azoture de Silicium,” Bull. Soc. Chim. Fr., 13, 791–93 (1913).
    • (1913) Bull. Soc. Chim. Fr. , vol.13 , pp. 791-93
    • Matignon, C.1
  • 36
    • 2442575436 scopus 로고
    • The High Temperature Equilibrium between Silicon Nitride, Silicon and Nitrogen
    • 36 W. B. Hincke and L. R. Brantley, “ The High Temperature Equilibrium between Silicon Nitride, Silicon and Nitrogen,” J. Am. Chem. Soc., 52, 48–52 (1930).
    • (1930) J. Am. Chem. Soc. , vol.52 , pp. 48-52
    • Hincke, W.B.1    Brantley, L.R.2
  • 37
    • 0042761389 scopus 로고    scopus 로고
    • Equilibrium Studies of Refractory Nitrides
    • 37 L. A. McClaine, C. P. Coppel, and A. D. Little, “ Equilibrium Studies of Refractory Nitrides,” Rept. No. Tech. AFML‐TR‐65‐99, Pt. 11, December 1966, cited in Ref. 3.
    • McClaine, L.A.1    Coppel, C.P.2    Little, A.D.3
  • 38
    • 0040019174 scopus 로고
    • The Heats of Formation of Metal Nitrides and Silicides by Fluorine Bomb Calorimetry
    • 38 J. L. Wood, G. P. Adams, J. Mukerji, and J. L. Margrave, “ The Heats of Formation of Metal Nitrides and Silicides by Fluorine Bomb Calorimetry,” Proc. Int. Conf. Chem. Thermodyn., 3rd, 2 [ 2 ] 115–22 (1973).
    • (1973) Proc. Int. Conf. Chem. Thermodyn., 3rd , vol.2 , Issue.2 , pp. 115-22
    • Wood, J.L.1    Adams, G.P.2    Mukerji, J.3    Margrave, J.L.4
  • 39
    • 0003588966 scopus 로고
    • Molecular Spectra and Molecular Structure, IV. Constants of Diatomic Molecues
    • 39 K. P. Huber and G. Herzberg ; pp. 602–603 in Molecular Spectra and Molecular Structure, IV. Constants of Diatomic Molecues. Van Nostrand‐Reinhold, New York, 1979.
    • (1979) , pp. 602-603
    • Huber, K.P.1    Herzberg, G.2
  • 40
    • 0001148560 scopus 로고
    • Mass Spectrometric Evidence for the Gaseous Si2N Molecule
    • 40 K. F. Zmbov and J. L. Margrave, “ Mass Spectrometric Evidence for the Gaseous Si 2 N Molecule,” J. Am. Chem. Soc., 89 [ 10 ] 2492–93 (1967).
    • (1967) J. Am. Chem. Soc. , vol.89 , Issue.10 , pp. 2492-93
    • Zmbov, K.F.1    Margrave, J.L.2
  • 41
    • 0000282229 scopus 로고
    • Analysis of Interlaboratory Measurements on the Vapor Pressure of Gold
    • 41 R. C. Paule and J. Mandel, “ Analysis of Interlaboratory Measurements on the Vapor Pressure of Gold,” Pure Appl. Chem., 31, 371–94 (1972).
    • (1972) Pure Appl. Chem. , vol.31 , pp. 371-94
    • Paule, R.C.1    Mandel, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.