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Volumn 352-354, Issue , 1996, Pages 1027-1032
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XPS, LEED and AFM investigation of the Si(100) surface after the deposition and annealing of tellurium thin films
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Author keywords
Atomic force microscopy; Low index single crystal surfaces; Silicon; Single crystal epitaxy; Surface roughening; Surface structure, morphology, roughness, and topography; Tellurium
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CHEMICAL BONDS;
DEPOSITION;
EVAPORATION;
LOW ENERGY ELECTRON DIFFRACTION;
MORPHOLOGY;
SILICON;
TELLURIUM;
THERMAL EFFECTS;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
PICTURESQUE MORPHOLOGY;
SILICON SUBSTRATE;
SILICON SURFACE;
TELLURIUM THIN FILMS;
SURFACE STRUCTURE;
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EID: 0030142490
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/0039-6028(95)01321-0 Document Type: Article |
Times cited : (13)
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References (22)
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