Blue-, green-, and red-light emission from Si+-implanted thermal SiO2 films on crystalline silicon

Journal of Luminescence

Volumn 68, Issue 2-4, 1996, Pages 199-204

  Liao, Liang Sheng ^a   Bao, Xi Mao ^a   Li, Ning Sheng ^a   Zheng, Xiang Qin ^a   Min, Nai Ben ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; ION IMPLANTATION; PRECIPITATION (CHEMICAL); QUANTUM THEORY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SILICA;

OXYGEN VACANCIES; PRIMARY COLOR EMISSION BANDS; ULTRAVIOLET EXCITATION;

LUMINESCENCE;

EID: 0030142157     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-2313(96)00023-3     Document Type: Article

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