Preparation of ordered vacancy chalcopyrite thin films by RF sputtering from CuInSe2 target with Na2Se

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 5 SUPPL. A, 1996, Pages 2779-2781

  Tanaka, Tooru ^a   Demizu, Yasutaka ^a   Yamaguchi, Toshiyuki ^b   Yoshida, Iakira ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b WAKAYAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

CuIn2Se3.5; CuIn3Se5; CuInse2; Na2Se; Ordered vacancy chalcopyrite; rf sputtering; Thin film

Indexed keywords

COMPOSITION; COPPER ALLOYS; CRYSTAL LATTICES; FILM PREPARATION; LIGHT ABSORPTION; MICROSCOPIC EXAMINATION; PRESSURE EFFECTS; SODIUM ALLOYS; SPUTTERING; TARGETS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

COPPER INDIUM SELENIDE; LATTICE PARAMETERS; ORDERED VACANCY CHALCOPYRITE THIN FILMS; RADIOFREQUENCY SPUTTERING; SODIUM SELENIDE; SPUTTERING CHAMBER;

SEMICONDUCTING FILMS;

EID: 0030141490     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2779     Document Type: Article

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