Water vapor in vacuum systems

Vacuum

Volumn 47, Issue 4, 1996, Pages 327-332

  Berman, A ^a  

^a HEBREW UNIVERSITY OF JERUSALEM   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATMOSPHERIC HUMIDITY; CHEMICAL BONDS; DEGASSING; DESORPTION; ECONOMICS; GASES; MOLECULES; PRESSURE; SURFACE PHENOMENA; VAPORS; WATER;

INTERNAL SURFACES; RESIDUAL GAS; TRANSFER ENERGY; VACUUM CHAMBERS; VACUUM PROCESSING EQUIPMENT;

VACUUM TECHNOLOGY;

EID: 0030130362     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(95)00246-4     Document Type: Article

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