Advanced manufacturing of SIMOX for low power electronics

Solid-State Electronics

Volumn 39, Issue 4 SPEC. ISS., 1996, Pages 499-504

  Alles, Michael ^a   Krull, Wade ^a  

^a Ibis Technology Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SUBSTRATES; WSI CIRCUITS;

LOW POWER ELECTRONICS; SEPARATION-BY-IMPLANTATION-OF-OXYGEN TECHNOLOGY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030130327     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1101(95)00225-1     Document Type: Article

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