Control of unconventional processes

Journal of Process Control

Volumn 6, Issue 2-3 SPEC. ISS., 1996, Pages 99-110

  Edgar, Thomas F ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Batch control; Materials processing; Microelectronics manufacturing; Model based control; Rapid thermal processing

Indexed keywords

AUTOMATION; CHEMICAL ENGINEERING; FLEXIBLE MANUFACTURING SYSTEMS; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; MICROELECTRONICS; OPERATIONS RESEARCH; PRODUCTION CONTROL; PRODUCTIVITY;

BATCH CHEMICAL PROCESSING; BATCH CONTROL; MATERIALS PROCESSING; RAPID THERMAL PROCESSING;

PROCESS CONTROL;

EID: 0030129298     PISSN: 09591524     EISSN: None     Source Type: Journal    
DOI: 10.1016/0959-1524(95)00056-9     Document Type: Article

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