Supercritical supersaturations and ultrafast cooling of the growth solution in liquid-phase epitaxy of semiconductors

Semiconductor Science and Technology

Volumn 11, Issue 4, 1996, Pages 607-619

  Abramov, A V ^a   Deryagin, N G ^a   Tret'yakov, D N ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; EPITAXIAL GROWTH; HETEROJUNCTIONS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; SUBSTRATES; SUPERSATURATION; TIN;

LATTICE MISMATCH; SOLUTION TEMPERATURE; SUBSTRATE TEMPERATURE; SUPERCRITICAL SUPERSATURATION; ULTRAFAST COOLING;

LIQUID PHASE EPITAXY;

EID: 0030129091     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/4/025     Document Type: Article

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