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Volumn 15, Issue 8, 1996, Pages 670-671
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Mechanism of nitridation at the melting temperature of silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
CRACK INITIATION;
ENERGY GAP;
INTERFACES (MATERIALS);
MELTING;
MOLTEN MATERIALS;
NITRIDING;
SHRINKAGE;
STRESS RELAXATION;
STRESSES;
TEMPERATURE;
VAPORIZATION;
MELTING TEMPERATURE;
NITRIDATION MECHANISM;
SILICON;
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EID: 0030128277
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: 10.1007/BF00264108 Document Type: Article |
Times cited : (4)
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References (15)
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