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Applied Physics Letters

Volumn 68, Issue 14, 1996, Pages 1910-1912

Temperature sensitivity and thermal expansion coefficient of benzocyclobutene thin films studied with ellipsometry

(3) Guo, S a Lundstrom I a Arwin, H a

a LINKÖPING UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC COMPOUNDS; COMPUTER AIDED ANALYSIS; ELLIPSOMETRY; MATHEMATICAL MODELS; OPTICAL SENSORS; REFRACTIVE INDEX; THERMAL EFFECTS; THERMAL EXPANSION; THICKNESS MEASUREMENT;

BENZOCYCLOBUTENE; FILM THICKNESS; OPTICAL CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY; TEMPERATURE SENSITIVITY; TEMPERATURE SENSORS; THERMAL EXPANSION COEFFICIENT; WAVELENGTH;

THIN FILMS;

EID: 0030128217 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.116291 Document Type: Article

Times cited : (13)

References (9)

1
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- K. Brudzewski, Sens. Actuators B 9, 59 (1992).
- (1992) Sens. Actuators B , vol.9 , pp. 59
- Brudzewski, K.¹

2
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- R. Jansson, H. Arwin, M. Armgarth, and I. Lundström, Appl. Surf. Sci. 37, 44 (1989).
- (1989) Appl. Surf. Sci. , vol.37 , pp. 44
- Jansson, R.¹ Arwin, H.² Armgarth, M.³ Lundström, I.⁴

3
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- J. Mårtensson, H. Arwin, and I. Lundström, Sens. Actuators B 1, 134 (1990).
- (1990) Sens. Actuators B , vol.1 , pp. 134
- Mårtensson, J.¹ Arwin, H.² Lundström, I.³

4
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- P. I. Perov, V. I. Kovalev, A. I. Rukovishnikov, N. M. Rossukanyi, and W. H. Johnson, Int. J. Electron. 76, 797 (1994).
- (1994) Int. J. Electron. , vol.76 , pp. 797
- Perov, P.I.¹ Kovalev, V.I.² Rukovishnikov, A.I.³ Rossukanyi, N.M.⁴ Johnson, W.H.⁵

5
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- D. Chardon and S. J. Huard, J. Lightwave Technol. 4, 720 (1986).
- (1986) J. Lightwave Technol. , vol.4 , pp. 720
- Chardon, D.¹ Huard, S.J.²

6
- 51249178189
- D. C. Burdeaux, P. H. Townsend, J. N. Carr, and P. E. Garrou, J. Electron. Mater. 19, 1357 (1990).
- (1990) J. Electron. Mater. , vol.19 , pp. 1357
- Burdeaux, D.C.¹ Townsend, P.H.² Carr, J.N.³ Garrou, P.E.⁴

7
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- S. M. Sze, VLSI Technology, 2nd ed. (McGraw-Hill, New York, 1988), p. 657.
- S. M. Sze, VLSI Technology, 2nd ed. (McGraw-Hill, New York, 1988), p. 657.

8
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- R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
- R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).

9
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- S. Guo, G. Gustafsson, O. J. Hagel, and H. Arwin, App. Opt. (in press).
- S. Guo, G. Gustafsson, O. J. Hagel, and H. Arwin, App. Opt. (in press).

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