Fluorine-contained films with high water-repellency and transparency prepared by RF plasma-enhanced CVD

Journal of Materials Science Letters

Volumn 15, Issue 8, 1996, Pages 675-677

  Hozumi, A ^a   Kakinoki, N ^a   Asai, Y ^a   Takai, O ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; CHEMICAL VAPOR DEPOSITION; CONTACT ANGLE; FLUORINE CONTAINING POLYMERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; PLASMA APPLICATIONS; SILANES; SUBSTRATES; TRANSPARENCY; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STATES; CONTACT ANGLEMETER; FLUORINE CONTAINED FILMS; FLUORO-ALKYL SILANE; RADIO FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; WATER DROP; WATER REPELLENCY;

PLASTIC FILMS;

EID: 0030128214     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF00264110     Document Type: Article

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