Vicinal and on-axis surfaces of 6H-SiC(0001) thin films observed by scanning tunneling microscopy

Surface Science

Volumn 350, Issue 1-3, 1996, Pages 247-253

  Tanaka, Satoru ^a,c   Kern, R Scott ^a   Davis, Robert F ^a   Wendelken, John F ^b   Xu, Jun ^b  

^a North Carolina State University   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Scanning tunneling microscopy; Silicon carbide; Stepped single crystal surfaces; Surface relaxation and reconstruction; Surface structure, morphology, roughness, and topography

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION; MOLECULAR BEAM EPITAXY; MORPHOLOGY; RELAXATION PROCESSES; SCANNING TUNNELING MICROSCOPY; SILICON CARBIDE; SILICON WAFERS; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACES;

ADATOMS; STEP BUNCHING; STEP CONFIGURATION; STEPPED SINGLE CRYSTAL SURFACES; SURFACE RECONSTRUCTION; TOPOGRAPHY; VICINAL SURFACES;

THIN FILMS;

EID: 0030126915     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(95)01105-6     Document Type: Article

References (22)

1. R.F. Davis, Physica B 185 (1993) 1.
2. R.F. Davis, G. Keiner, M. Shur, J.W. Palmour and J.A. Edmond, Proc. IEEE 79 (1991) 677.
3. H. Matsunami, Physica B 185 (1993) 65.
4. L.B. Rowland, R.S. Kern, S. Tanaka and R.F. Davis, J. Mater. Res. 8 (1993) 2753.
5. H.S. Kong, J.T. Glass and R.F. Davis, J. Appl. Phys. 64 (1988) 2672.
6. T. Kimoto, H. Nishino, W.S. Yoo and H. Matsunami, J. Appl. Phys. 73 (1993) 726.
7. Z. Sitar, M.J. Paisley, Y.J. Ruan, W.J. Choyke and R.F. Davis, J. Vac. Sci. Technol. B 8 (1990) 316.
8. C. Wang and R.F. Davis, Appl. Phys. Lett. 63 (1993) 990.
9. S. Tanaka, R.S. Kern and R.F. Davis, Appl. Phys. Lett. 65 (1994) 2851.
10. A.J. Van Bommel, J.E. Crombeen and A. Van Tooren, Surf, Sci. 48 (1975) 463.
11. R. Kaplan, Surf. Sci. 215 (1989) 111.
12. D. Rogers and T. Tiedje, Surf. Sci. 274 (1992) L599.
13. M.A. Kulakov, P. Heuell, V.F. Tsvetkov and B. Bullemer, Surf. Sci. 315 (1994) 248.
14. C.S. Chang, I.S.T. Tsong, Y.C. Wang and R.F. Davis, Surf. Sci. 256 (1991) 354.
15. A.J. Steckl, M.D. Roth, J.A. Powell and D.J. Larkin, Appl. Phys. Lett. 62 2545 (1993).
16. S. Tyc, Inst. Phys. Conf. Ser. 137 (1993) 333.
17. T. Kimoto and H. Matsunami, J. Appl. Phys. 75 (1994) 850.
18. L.B. Rowland, R.S. Kern, S. Tanaka and R.F. Davis, J. Mater. Res. 8 (1993) 2753.
19. L. Muehlhoff, W.J. Choyke, M.J. Bozack and J.T. Yates Jr., J. Appl. Phys. 60 (1986) 2842.
20. F.R. Chien, S.R. Nutt, W.S. Woo, T. Kimoto and H. Matsunami, J. Mater. Res. 9 (1994) 940.
21. B. Bullemer, private communication.
22. V. Heine, C. Chen and R.J. Needs, J. Am. Ceram. Soc. 74 (1991) 2630.