Precision X-Y microstage with maneuverable kinematic coupling mechanism

Precision Engineering

Volumn 18, Issue 2-3, 1996, Pages 85-94

  Taylor, James B ^a   Tu, Jay F ^b  

^a North Carolina State University   (United States)

^b SCHOOL OF INDUSTRIAL ENGINEERING   (United States)

Author keywords

Kinematic coupling; Mechanical advantage; Microstage

Indexed keywords

ACTUATORS; KINEMATICS; MOTION CONTROL; PRECISION ENGINEERING; SENSORS;

KINEMATIC COUPLING; MECHANICAL ADVANTAGE; MECHANICAL AMPLIFICATION; MICROPOSITIONING SYSTEM; MICROSTAGE; PATH CONTROL; POSITION SENSORS; TWO DIMENSIONAL; ULTRAHIGH POSITIONING RESOLUTION;

POSITION CONTROL;

EID: 0030126108     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(96)00036-0     Document Type: Article

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