Growth of diamond thin films by microwave plasma chemical vapor deposition process

Journal of Materials Research

Volumn 11, Issue 4, 1996, Pages 1019-1024

  Barshilia, H C ^a   Mehta, B R ^a   Vankar, V D ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; EMISSION SPECTROSCOPY; FILM GROWTH; MORPHOLOGY; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0030126020     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0127     Document Type: Article

References (21)

1. J. C. Angus, Thin Solid Films 216, 126 (1992).
2. K. E. Spear, J. Am. Ceram. Soc. 72 (2), 171 (1989).
3. W. A. Yarbrough and R. Messier, Science 247, 688 (1990).
4. K. Kobashi, K. Nishimura, Y. Kawate, and T. Horiuchi, Phys. Rev. B 38 (6), 4067 (1988).
5. C. V. Deshpandey and R. F. Bunshah, J. Vac. Sci. Technol. A 7 (3), 2294 (1989).
6. P. G. Partridge, P. W. May, C. A. Rego, and M. N. R. Ashfold, Mater. Sci. Technol. 10, 505 (1994).
7. M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth 62, 642 (1983).
8. R. Ramesham and T. Roppel, J. Mater. Res. 7, 1144 (1992).
9. R. Ramesham and C. Ellis, J. Mater. Res. 7, 1189 (1992).
10. Y. Mitsuda, T. Yoshida, and K. Akashi, Rev. Sci. Instrum. 60 (2), 249 (1989).
11. Y. Saito, S. Matsuda, and S. Nogita, J. Mater. Sci. Lett. 5, 565 (1986).
12. Y. Mitsuda, Y. Kojima, T. Yoshida, and K. Akashi, J. Mater. Sci. 22, 1557 (1987).
13. S. W. Reeve and W. A. Weimer, Thin Solid Films 236, 91 (1993).
14. O. Matsumoto, H. Toshima, and Y. Kanzaki, Thin Solid Films 128, 341 (1985).
15. J. Wagner, Ch. Wild, F. Pohl, and P. Koidl, Appl. Phys. Lett. 48 (2), 106 (1986).
16. Y. Mitsuda, K. Tanaka, and T. Yoshida, J. Appl. Phys. 67 (8), 3604 (1990).
17. G. Balestrino, M. Marinelli, E. Milani, A. Paoletti, I. Pinter, A. Tebano, and P. Paroli, Appl. Phys. Lett. 62 (8), 879 (1993).
18. M. Marinelli, E. Milani, M. Montuori, A. Paoletti, A. Tebano, and G. Balestrino, J. Appl. Phys. 76 (10), 5702 (1994).
19. A. R. Badzian, Advances in X-Ray Analysis, edited by C. S. Barrett (Plenum, New York, 1988), Vol. 31, p. 113.
20. J. H. Je and G. Y. Lee, J. Mater. Sci. 27, 6324 (1992).
21. M. Weiler, R. Kleber, K. Jung, and H. Ehrhardt, Diamond Relat. Mater. 1, 121 (1992).