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Volumn 43, Issue 4, 1996, Pages 605-612

Comparison of gate-induced drain leakage and charge pumping measurements for determining lateral interface trap profiles in electrically stressed MOSFET's

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRIC VARIABLES MEASUREMENT; HOT CARRIERS; INTERFACES (MATERIALS); LEAKAGE CURRENTS; MATHEMATICAL MODELS; SHORT CIRCUIT CURRENTS;

EID: 0030125770     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.485543     Document Type: Article
Times cited : (27)

References (17)
  • 1
    • 0020114405 scopus 로고    scopus 로고
    • Determination of spatial surface state density distribution in MOS and SIMOS transistors after channel hot electron injection, vol. 18, p. 372, 1982.
    • H. E. Maes and G. Groeseneken, "Determination of spatial surface state density distribution in MOS and SIMOS transistors after channel hot electron injection," Electron. Lett., vol. 18, p. 372, 1982.
    • Electron. Lett.
    • Maes, H.E.1    Groeseneken, G.2
  • 2
    • 0024125256 scopus 로고    scopus 로고
    • Lateral distribution of hot-carrier-induced interface traps in MOSFET's, vol. 35, p. 2221, 1988.
    • M. G. Ancona, M. S. Saks, and D. McCarthy, "Lateral distribution of hot-carrier-induced interface traps in MOSFET's," IEEE Trans. Elctrûn Devices, vol. 35, p. 2221, 1988.
    • IEEE Trans. Elctrûn Devices
    • Ancona, M.G.1    Saks, M.S.2    McCarthy, D.3
  • 3
    • 0024705114 scopus 로고    scopus 로고
    • Analysis of the charge pumping technique and its application for the evaluation of MOSFET degradation, IEEE Trans. Electron Devices, vol. 36, p. 1318, 1989.
    • P. Hercmans, }. Witters, G. Groeseneken, and H. E. Maes, "Analysis of the charge pumping technique and its application for the evaluation of MOSFET degradation," IEEE Trans. Electron Devices, vol. 36, p. 1318, 1989.
    • }. Witters, G. Groeseneken, and H. E. Maes
    • Hercmans, P.1
  • 4
    • 0026187918 scopus 로고    scopus 로고
    • A new technique for measuring lateral distribution of oxide charge and interface traps near MOSFET junctions, vol. 12, p. 393, 1991.
    • W. Chen and T.-P. Ma, "A new technique for measuring lateral distribution of oxide charge and interface traps near MOSFET junctions," IEEE Electron Device Lett., vol. 12, p. 393, 1991.
    • IEEE Electron Device Lett.
    • Chen, W.1    Ma, T.-P.2
  • 5
    • 0027147283 scopus 로고    scopus 로고
    • Lateral profiling of oxide charge and interface traps near MOSFET junctions, vol. 40, p. 187, 1993.
    • W. Chen, A. Balasinski, and T. P. Ma, "Lateral profiling of oxide charge and interface traps near MOSFET junctions," IEEE Trans. Electron Devices, vol. 40, p. 187, 1993.
    • IEEE Trans. Electron Devices
    • Chen, W.1    Balasinski, A.2    Ma, T.P.3
  • 6
    • 0025448159 scopus 로고    scopus 로고
    • Characterization of hot-electronstressed MOSFET's by low-temperature measurements of the drain tunnel current, vol. 37, p. 1467, 1990.
    • A. Acovic, M. Dutoit, and M. Ilegems, "Characterization of hot-electronstressed MOSFET's by low-temperature measurements of the drain tunnel current," IEEE Trans. Electron Devices, vol. 37, p. 1467, 1990.
    • IEEE Trans. Electron Devices
    • Acovic, A.1    Dutoit, M.2    Ilegems, M.3
  • 7
    • 33746941563 scopus 로고    scopus 로고
    • Spatially resolved measurements of hot-carrier generated defects at the Si-SiO 2 interface. in Proc. INFOS '91, W. Eccleston and M. Uren, Eds. New York: Adam Hilger, 1991, p. 247.
    • A. Asenov, J. Berger, P. Speckbacher, F. Koch, and W. Weber, "Spatially resolved measurements of hot-carrier generated defects at the Si-SiO2 interface." in Proc. INFOS '91, W. Eccleston and M. Uren, Eds. New York: Adam Hilger, 1991, p. 247.
    • J. Berger, P. Speckbacher, F. Koch, and W. Weber
    • Asenov, A.1
  • 8
    • 0029321704 scopus 로고    scopus 로고
    • Spatial distribution of interface traps after hot-carrier stress from forward G1DL measurements, vol. 28, p. 261, 1995.
    • S. Okhonin, T. Hessler, and M. Dutoit, "Spatial distribution of interface traps after hot-carrier stress from forward G1DL measurements," Microelectron. Eng., vol. 28, p. 261, 1995.
    • Microelectron. Eng.
    • Okhonin, S.1    Hessler, T.2    Dutoit, M.3
  • 9
    • 49949136852 scopus 로고    scopus 로고
    • Surface effects on p-n junctions: characteristics of surface space-charge regions under nonequilibrium conditions, vol. 9, p. 783, 1966.
    • A. S. Grove and D. 1. Fitzgerald, "Surface effects on p-n junctions: characteristics of surface space-charge regions under nonequilibrium conditions," Solid State Electron., vol. 9, p. 783, 1966.
    • Solid State Electron.
    • Grove, A.S.1    Fitzgerald, D.I.2
  • 11
    • 0028737905 scopus 로고    scopus 로고
    • FOND (Fully Overlapped Nitride-etch defined Device): a new device architecture for highreliability and high-performance deep submicron CMOS technology, 83, 1994.
    • J.-P. Miéville, G. Van den bosch, L. Deferm, R. Bellens, G. Groeseneken, H. E. Maes, and W. Schoenmaker, "FOND (Fully Overlapped Nitride-etch defined Device): a new device architecture for highreliability and high-performance deep submicron CMOS technology," 1EDM Tech. Dig., p. 83, 1994.
    • EDM Tech. Dig.
    • Miéville, J.-P.1    Van Den Bosch, G.2    Deferm, L.3    Bellens, R.4    Groeseneken, G.5    Maes, H.E.6    Schoenmaker, W.7
  • 12
    • 33746968413 scopus 로고    scopus 로고
    • 4 and MEDICI, Technology Modeling Associates, Inc., Palo Alto, CA.
    • [12J "SUPREM-4 and MEDICI," Technology Modeling Associates, Inc., Palo Alto, CA.
    • Suprem-, J.1
  • 14
    • 0024612061 scopus 로고    scopus 로고
    • Hot-carrier degradation of n-channel MOSFET's characterized by a gated-diode measurement technique, vol. 10, p. 76, 19X9.
    • T. Giebel and K. doser, "Hot-carrier degradation of n-channel MOSFET's characterized by a gated-diode measurement technique," IEEE Electron Device lje.lt., vol. 10, p. 76, 19X9.
    • IEEE Electron Device Lje.lt.
    • Giebel, T.1    Doser, K.2
  • 15
    • 0025388736 scopus 로고    scopus 로고
    • Hotcarricr-induced deep-level defects from gated-diode measurements on MOSFET's, vol. 11, p. 95, 1990.
    • P. Speckbacher, A. Asenov, M. Bollu, F. Koch, and W. Weber, "Hotcarricr-induced deep-level defects from gated-diode measurements on MOSFET's," IEEE Electron Device Lett., vol. 11, p. 95, 1990.
    • IEEE Electron Device Lett.
    • Speckbacher, P.1    Asenov, A.2    Bollu, M.3    Koch, F.4    Weber, W.5
  • 16
    • 84907978569 scopus 로고    scopus 로고
    • Interface states extracted from gated diode and charge pumping measurements, in 90, P. Rossler and W. Eccleston, Eds. Bristol: Adam Hilger, 1990, p. 583.
    • F. Hofmann, "Interface states extracted from gated diode and charge pumping measurements," in Proc. ESSDERC'90, P. Rossler and W. Eccleston, Eds. Bristol: Adam Hilger, 1990, p. 583.
    • Proc. ESSDERC'
    • Hofmann, F.1
  • 17
    • 0027680606 scopus 로고    scopus 로고
    • A new charge pumping method for determining the spatial distribution of hot-carrierinduced fixed charge in p-MOSFET's, vol. 40, p. 1768, 1993.
    • M. Tsuchiaki, H. Hara, T. Morimoto, and H. Iwai, "A new charge pumping method for determining the spatial distribution of hot-carrierinduced fixed charge in p-MOSFET's," IEEE Trans. Electron Devices, vol. 40, p. 1768, 1993.
    • IEEE Trans. Electron Devices
    • Tsuchiaki, M.1    Hara, H.2    Morimoto, T.3    Iwai, H.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.