Characterization of a DC arcjet plasma for diamond growth by measurement of spatial distributions of optical emission

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 4 A, 1996, Pages 2306-2313

  Yamaguchi, Hiromi ^a   Ishii, Masahiro ^a   Uematsu, Kazuo ^a   Morimoto, Shinji ^a  

^a IHI CORPORATION   (Japan)

Author keywords

Background pressure; DC arcjet; Diamond film; Emissive radical; Optical emission; Plasma diagnostics; Spatial distribution of emission intensity

Indexed keywords

DIAMOND FILMS; ELECTRIC VARIABLES MEASUREMENT; ELECTRODES; FREE RADICALS; LIGHT EMISSION; MORPHOLOGY; PLASMA DIAGNOSTICS; PLASMA SOURCES; PLASMA TORCHES; SUBSTRATES;

ARC DISCHARGE; ATOMIC HYDROGEN; CHOKE VALVE; DIAMOND GROWTH; EMISSIVE RADICAL; IN SITU MEASUREMENT;

PLASMA JETS;

EID: 0030125317     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2306     Document Type: Article

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