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Volumn 21, Issue 4, 1996, Pages 38-44
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The effect of strain on the formation of dislocations at the SiGe/Si interface
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL LATTICES;
EFFECTS;
INTERFACES (MATERIALS);
MORPHOLOGY;
NUCLEATION;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
STRAIN;
STRESS RELAXATION;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
LATTICE MISMATCH;
MODIFIED FRANK-READ MECHANISM;
SINGLE FORMATION THEORY;
STRAIN EFFECTS;
DISLOCATIONS (CRYSTALS);
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EID: 0030125305
PISSN: 08837694
EISSN: None
Source Type: Journal
DOI: 10.1557/S0883769400035326 Document Type: Article |
Times cited : (55)
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References (27)
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