SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 4 A, 1996, Pages 2000-2007

Effects of recoil-implanted oxygen on depth profiles of defects and annealing processes in P+-implanted Si studied using monoenergetic positron beams

(9) Uedono, Akira a Kitano, Tomohisa b Watanabe, Masahito b Moriya, Tsuyoshi a Kawano, Takao a Tanigawa, Shoichiro a Suzuki, Ryoichi c Ohdaira, Toshiyuki c Mikado, Tomohisa c

a UNIVERSITY OF TSUKUBA (Japan)

b NEC CORPORATION (Japan)

c ELECTROTECHNICAL LABORATORY (Japan)

Author keywords

Defect; Ion implantation; Monoenergetic positron beam; Oxygen; Positron annihilation; Si; Vacancy

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; CRYSTAL DEFECTS; CRYSTAL GROWTH FROM MELT; EFFECTS; FILM GROWTH; INTERFACES (MATERIALS); ION IMPLANTATION; OXYGEN; SILICA; SUBSTRATES;

MONOENERGETIC POSITRON BEAMS; POSITRON ANNIHILATION;

SEMICONDUCTING SILICON;

EID: 0030123742 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.2000 Document Type: Article

Times cited : (25)

References (41)

1
- 0004249889
- John Wiley & Sons, Chichester
- H. Ryssel and I. Ruge: Ion Implantation (John Wiley & Sons, Chichester, 1986).
- (1986) Ion Implantation
- Ryssel, H.¹ Ruge, I.²

2
- 5544293190
- A. Goetzberger, D. J. Bartelink, J. P. McVittie and J. F. Gibbons: Appl. Phys. Lett. 29 (1976) 259.
- (1976) Appl. Phys. Lett. , vol.29 , pp. 259
- Goetzberger, A.¹ Bartelink, D.J.² McVittie, J.P.³ Gibbons, J.F.⁴

3
- 5544279337
- T. Hirao, G. Fuse, K. Inoue, S. Takayanagi, Y. Yaegashi and S. Ichikawa: J. Appl. Phys. 50 (1979) 5151.
- (1979) J. Appl. Phys. , vol.50 , pp. 5151
- Hirao, T.¹ Fuse, G.² Inoue, K.³ Takayanagi, S.⁴ Yaegashi, Y.⁵ Ichikawa, S.⁶

4
- 0043218812
- T. R. Cass and V. G. K. Reddi: Appl. Phys. Lett. 23 (1973) 268.
- (1973) Appl. Phys. Lett. , vol.23 , pp. 268
- Cass, T.R.¹ Reddi, V.G.K.²

5
- 3042990030
- R. A. Moline and A. G. Cullis: Appl. Phys. Lett. 26 (1975) 551.
- (1975) Appl. Phys. Lett. , vol.26 , pp. 551
- Moline, R.A.¹ Cullis, A.G.²

6
- 0003342940
- ed. P. Hautojärvi Springer-Verlag, Berlin
- P. Hautojärvi and A. Vehanen: Positrons in Solids, ed. P. Hautojärvi (Springer-Verlag, Berlin, 1979) p. 1.
- (1979) Positrons in Solids , pp. 1
- Hautojärvi, P.¹ Vehanen, A.²

7
- 0001670671
- A. Uedono, Y. Ujihira, A. Ikari, H. Haga and O. Yoda: Hyperfine Interactions 79 (1993) 615.
- (1993) Hyperfine Interactions , vol.79 , pp. 615
- Uedono, A.¹ Ujihira, Y.² Ikari, A.³ Haga, H.⁴ Yoda, O.⁵

8
- 3142708481
- P. J. Schultz and K. G. Lynn: Rev. Mod. Phys. 60 (1988) 701.
- (1988) Rev. Mod. Phys. , vol.60 , pp. 701
- Schultz, P.J.¹ Lynn, K.G.²

9
- 0040688044
- J. Mäkinen, E. Punkka, A. Vehanen, P. Hautojärvi, J. Keinonen, M. Hautala and E. Rauhala: J. Appl. Phys. 67 (1990) 990.
- (1990) J. Appl. Phys. , vol.67 , pp. 990
- Mäkinen, J.¹ Punkka, E.² Vehanen, A.³ Hautojärvi, P.⁴ Keinonen, J.⁵ Hautala, M.⁶ Rauhala, E.⁷

10
- 0011925369
- P. J. Simpson, M. Vos, I. V. Mitchell, C. Wu and P. J. Schultz: Phys. Rev. B 44 (1991) 12180.
- (1991) Phys. Rev. B , vol.44 , pp. 12180
- Simpson, P.J.¹ Vos, M.² Mitchell, I.V.³ Wu, C.⁴ Schultz, P.J.⁵

11
- 0642265828
- A. Uedono, L. Wei, S. Tanigawa, J. Sugiura, M. Ogasawara and M. Tamura: Radiat. Eff. & Defects Solids 124 (1992) 31.
- (1992) Radiat. Eff. & Defects Solids , vol.124 , pp. 31
- Uedono, A.¹ Wei, L.² Tanigawa, S.³ Sugiura, J.⁴ Ogasawara, M.⁵ Tamura, M.⁶

12
- 0038816780
- M. Fujinami and N. B. Chilton: J. Appl. Phys. 73 (1993) 3242.
- (1993) J. Appl. Phys. , vol.73 , pp. 3242
- Fujinami, M.¹ Chilton, N.B.²

13
- 0001457863
- Cs. Szeles, B. Nielsen, P. Asoka-Kumar, K. G. Lynn, M. Anderle, T. P. Ma and G. W. Rubloff: J. Appl. Phys. 76 (1994) 3403.
- (1994) J. Appl. Phys. , vol.76 , pp. 3403
- Szeles, Cs.¹ Nielsen, B.² Asoka-Kumar, P.³ Lynn, K.G.⁴ Anderle, M.⁵ Ma, T.P.⁶ Rubloff, G.W.⁷

14
- 5544294927
- Electrochemical Society, Pennington, 90-1
- H. Kikuchi, F. Toyokawa, M. Sakamoto and M. Mikami: Ext. Abstr. 177th Society Meeting (Electrochemical Society, Pennington, 1990) 90-1, p. 654.
- (1990) Ext. Abstr. 177th Society Meeting , pp. 654
- Kikuchi, H.¹ Toyokawa, F.² Sakamoto, M.³ Mikami, M.⁴

15
- 0002894337
- ed. P. Hautojärvi Springer-Verlag, Berlin
- R. N. West: Positrons in Solids, ed. P. Hautojärvi (Springer-Verlag, Berlin, 1979) p. 89.
- (1979) Positrons in Solids , pp. 89
- West, R.N.¹

16
- 0005612321
- ed. K. Sumino Elsevier, North-Holland
- S. Dannefaer: Defect Control in Semiconductors, ed. K. Sumino (Elsevier, North-Holland, 1990) p. 1561.
- (1990) Defect Control in Semiconductors , pp. 1561
- Dannefaer, S.¹

17
- 4243728491
- J. W. Corbett, J. P. Karins and T. Y. Tan: Nucl. Inst. & Methods 182/183 (1981) 457.
- (1981) Nucl. Inst. & Methods , vol.182-183 , pp. 457
- Corbett, J.W.¹ Karins, J.P.² Tan, T.Y.³

18
- 0027664260
- A. Uedono, L. Wei, S. Tanigawa, R. Suzuki, H. Ohgaki, T. Mikado, H. Kametani, H. Akiyama, Y. Yamaguchi and M. Koumaru: Jpn. J. Appl. Phys. 32 (1993) 3682.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 3682
- Uedono, A.¹ Wei, L.² Tanigawa, S.³ Suzuki, R.⁴ Ohgaki, H.⁵ Mikado, T.⁶ Kametani, H.⁷ Akiyama, H.⁸ Yamaguchi, Y.⁹ Koumaru, M.¹⁰

19
- 0000493768
- A. van Veen, H. Schut, J. de Vries, R. A. Hakvoort and M. R. Ijpma: AIP Conf. Proc. 218 (1990) 171.
- (1990) AIP Conf. Proc. , vol.218 , pp. 171
- Van Veen, A.¹ Schut, H.² De Vries, J.³ Hakvoort, R.A.⁴ Ijpma, M.R.⁵

20
- 0020834651
- S. Valkealahti and R. M. Nieminen: Appl. Phys. A 32 (1983) 95.
- (1983) Appl. Phys. A , vol.32 , pp. 95
- Valkealahti, S.¹ Nieminen, R.M.²

21
- 36449006819
- A. Uedono, L. Wei, S. Tanigawa, R. Suzuki, H. Ohgaki, T. Mikado and Y. Ohji: J. Appl. Phys. 75 (1994) 3822.
- (1994) J. Appl. Phys. , vol.75 , pp. 3822
- Uedono, A.¹ Wei, L.² Tanigawa, S.³ Suzuki, R.⁴ Ohgaki, H.⁵ Mikado, T.⁶ Ohji, Y.⁷

22
- 0026120607
- R. Suzuki, Y. Kobayashi, T. Mikado, H. Ohgaki, M. Chiwaki, T. Yamazaki and T. Tomimasu: Jpn. J. Appl. Phys. 30 (1991) L532.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Suzuki, R.¹ Kobayashi, Y.² Mikado, T.³ Ohgaki, H.⁴ Chiwaki, M.⁵ Yamazaki, T.⁶ Tomimasu, T.⁷

23
- 8744287918
- P. Kirkegaard, M. Eldrup, O. E. Mogensen and N. J. Pedersen: Comput. Phys. Commun. 23 (1981) 307.
- (1981) Comput. Phys. Commun. , vol.23 , pp. 307
- Kirkegaard, P.¹ Eldrup, M.² Mogensen, O.E.³ Pedersen, N.J.⁴

24
- 0000235265
- J. P. Biersack and L. G. Haggmark: Nucl. Instrum. Methods 174 (1980) 257.
- (1980) Nucl. Instrum. Methods , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, L.G.²

25
- 0014872480
- H. J. Stein and W. Beezhold: Appl. Phys. Lett. 17 (1970) 442.
- (1970) Appl. Phys. Lett. , vol.17 , pp. 442
- Stein, H.J.¹ Beezhold, W.²

26
- 0347760964
- J. Keinonen, M. Hautala, E. Rauhara, V. Karttunen, A. Kuronen, J. Räisänen, J. Lahtinen, A. Vehanen, E. Punkka and P. Hautojärvi: Phys. Rev. B 37 (1988) 8269.
- (1988) Phys. Rev. B , vol.37 , pp. 8269
- Keinonen, J.¹ Hautala, M.² Rauhara, E.³ Karttunen, V.⁴ Kuronen, A.⁵ Räisänen, J.⁶ Lahtinen, J.⁷ Vehanen, A.⁸ Punkka, E.⁹ Hautojärvi, P.¹⁰

27
- 33750363766
- J. W. Corbett, G. D. Watkins and R. S. McDonald: Phys. Rev. 135 (1964) 1381.
- (1964) Phys. Rev. , vol.135 , pp. 1381
- Corbett, J.W.¹ Watkins, G.D.² McDonald, R.S.³

28
- 0028198044
- A. Uedono, Y. K. Cho, S. Tanigawa and A. Ikari: Jpn. J. Appl. Phys. 33 (1994) 1.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 1
- Uedono, A.¹ Cho, Y.K.² Tanigawa, S.³ Ikari, A.⁴

29
- 0025401872
- A. Uedono, S. Tanigawa, H. Funamoto, A. Nishikawa and K. Takahashi: Jpn. J. Appl. Phys. 29 (1990) 555.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 555
- Uedono, A.¹ Tanigawa, S.² Funamoto, H.³ Nishikawa, A.⁴ Takahashi, K.⁵

30
- 0029309343
- A. Kawasuso, M. Hasegawa, M. Suezawa, S. Yamaguchi and K. Sumino: Jpn. J. Appl. Phys. 34 (1995) 2197.
- (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 2197
- Kawasuso, A.¹ Hasegawa, M.² Suezawa, M.³ Yamaguchi, S.⁴ Sumino, K.⁵

31
- 0014604532
- F. L. Vook and H. J. Stein: Rad. Eff. 2 (1969) 23.
- (1969) Rad. Eff. , vol.2 , pp. 23
- Vook, F.L.¹ Stein, H.J.²

32
- 0015035290
- L. T. Chadderton: Rad. Eff. 8 (1971) 77.
- (1971) Rad. Eff. , vol.8 , pp. 77
- Chadderton, L.T.¹

33
- 0014882641
- F. F. Morehead and B. L. Crowder: Rad. Eff. 6 (1970) 27.
- (1970) Rad. Eff. , vol.6 , pp. 27
- Morehead, F.F.¹ Crowder, B.L.²

34
- 0346003810
- J. F. Gibbons: Proc. IEEE 60 (1972) 1062.
- (1972) Proc. IEEE , vol.60 , pp. 1062
- Gibbons, J.F.¹

35
- 0017948718
- J. R. Dennis and E. B. Hale: J. Appl. Phys. 49 (1978) 1119.
- (1978) J. Appl. Phys. , vol.49 , pp. 1119
- Dennis, J.R.¹ Hale, E.B.²

36
- 0026108754
- A. Uedono, L. Wei, C. Dosho, H. Kondo, S. Tanigawa, J. Sugiura and M. Ogasawara: Jpn. J. Appl. Phys. 30 (1991) 201.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 201
- Uedono, A.¹ Wei, L.² Dosho, C.³ Kondo, H.⁴ Tanigawa, S.⁵ Sugiura, J.⁶ Ogasawara, M.⁷

37
- 0026202633
- A. Uedono, L. Wei, C. Dosho, H. Kondo, S. Tanigawa and M. Tamura: Jpn. J. Appl. Phys. 30 (1991) 1597.
- (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 1597
- Uedono, A.¹ Wei, L.² Dosho, C.³ Kondo, H.⁴ Tanigawa, S.⁵ Tamura, M.⁶

38
- 4243791029
- B. Villepelet, F. Ferrieu, A. Grouillet, A. Golanski, J. P. Gailliard and E. Ligeon: Nucl. Instrum. & Methods 182/183 (1981) 137.
- (1981) Nucl. Instrum. & Methods , vol.182-183 , pp. 137
- Villepelet, B.¹ Ferrieu, F.² Grouillet, A.³ Golanski, A.⁴ Gailliard, J.P.⁵ Ligeon, E.⁶

39
- 0042216602
- A. Uedono, T. Kawano, S. Tanigawa, A. Urano, M. Kyoto and H. Itoh: J. Phys. Condens. Matter 7 (1995) 5139.
- (1995) J. Phys. Condens. Matter , vol.7 , pp. 5139
- Uedono, A.¹ Kawano, T.² Tanigawa, S.³ Urano, A.⁴ Kyoto, M.⁵ Itoh, H.⁶

40
- 0042080055
- A. Uedono, L. Wei, S. Tanigawa, R. Suzuki, H. Ohgaki, T. Mikado and Y. Ohji: J. Appl. Phys. 74 (1993) 7251.
- (1993) J. Appl. Phys. , vol.74 , pp. 7251
- Uedono, A.¹ Wei, L.² Tanigawa, S.³ Suzuki, R.⁴ Ohgaki, H.⁵ Mikado, T.⁶ Ohji, Y.⁷

41
- 0028480537
- A. Uedono, T. Kawano, L. Wei, S. Tanigawa, A. Ikari, K. Kawakami and H. Itoh: Jpn. J. Appl. Phys. 33 (1994) L1131.
- (1994) Jpn. J. Appl. Phys. , vol.33
- Uedono, A.¹ Kawano, T.² Wei, L.³ Tanigawa, S.⁴ Ikari, A.⁵ Kawakami, K.⁶ Itoh, H.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.