Characterization of SiOxNyHz and SiNyHz using RBS, ERDA and NRA: In memoriam Priv.-Doz. Dr. Rainer P.H. Garten

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 111, Issue 1-2, 1996, Pages 115-125

  Wielunski, M ^a   Bubert, H ^b   Garten, R P H ^c  

^a TU DORTMUND UNIVERSITY   (Germany)

^b LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

^c MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COMPOSITION; DENSITY (SPECIFIC GRAVITY); DEPOSITION; ELLIPSOMETRY; ION BEAMS; NITROGEN; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THICKNESS MEASUREMENT; THIN FILMS;

ATOMIC RATIOS; DEPTH PROFILING; ELASTIC RECOIL DETECTION ANALYSIS; HEAVY ION ELASTIC RECOIL DETECTION; NUCLEAR REACTION ANALYSIS; SILICON OXYNITRIDE;

SILICON NITRIDE;

EID: 0030123499     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01256-7     Document Type: Article

References (35)

1. L.J. van IJzendoom, Anal. Chem. Acta 297 (1994) 55.
2. H.C. Hofsäss, N.R. Parkh, M.L. Swanson and W.-K. Chu, Nucl. Instr. and Meth. B 45 (1990) 151.
3. G. Demortier, S. Mathot and B. van Oystacyen, Nucl. Instr. and Meth. B 49 (1990) 46.
4. W. De Coster, B. Brijs, H. Bender, J. Alay and W. Vandervorst, Vacuum 45 (1994) 389.
5. G.G. Ross, Vacuum 45 (1994) 375.
6. L.C. Feldman, J.W. Mayer and S.T. Picraux, Materials Analysis by Ion Channeling (Academic Press, New York, 1982).
7. O. Spindler, Laboratory HC-PE-22, Siemens AG, München, Germany, private communication, 1991.
8. F.H.P.M. Habraken, State University, Utrecht, The Netherlands, private communication, 1991.
9. K. Brand, Materials Science and Engineering B 2 (1989) 237.
10. L.R. Doolittle, Nucl. Instr. and Meth. B 15 (1986) 227.
11. M. Wielunski, unpublished data, University of Bochum (1993).
12. B.M.U. Scherzer, H.L. Bay, R. Behrisch, P. Borgesen and I. Roth, Nucl. Instr. and Meth. 157 (1978) 75.
13. W.K. Chu, J.W. Mayer and M.A. Nicolet, Backscattering Spectrometry (Academic Press, New York, 1978).
14. J.W. Mayer and E. Rimini, Ion Beam Handbook for Material Analysis (Academic Press, New York, 1977).
15. M. Hacke, J. Meijer, A. Stephan, H.H. Bukow, M. Höfert and C. Rolfs, Z. Phys. A 346 (1993) 309.
16. B.M.U. Scherzer, M. Wielunski, W. Möller, A. Turos and J. Roth, Nucl. Instr. and Meth. B 33 (1988) 714.
17. Y. Tamminga, M.F.C. Willemsen, F.H.P.M. Habraken and A.E.T. Kuiper, Nucl. Instr. and Meth. 200 (1982) 499.
18. Th. Enders, M. Rilli and H.D. Carstanjen, Nucl. Instr. and Meth. B 64 (1992) 817.
19. O. Kruse and H.D. Carstanjen, Nucl. Instr. and Meth. B 89 (1994) 191.
20. J.F. Ziegler and I.E.E. Baglin, J. Appl. Phys. 45 (1974) 1888.
21. R.A. Jarjis, Nuclear cross-section data for surface analysis, University of Manchester, 1979.
22. D. Boutard, W. Möller and B.M.U. Scherzer, Phys. Rev. B 38 (1988) 2988.
23. J.R. Sabin and J. Oddershede, Nucl. Instr. and Meth. B 27 (1987) 280.
24. H.H. Andersen and J.F. Ziegler, Stopping Powers and Ranges in All Elements, Vols. 3 and 4 (Pergamon, New York, 1977).
25. J.E.E. Baglin, A.J. Kellock, M.A. Crockett and A.H. Shih, Nucl. Instr. and Meth. B 64 (1992) 469.
26. S. Rubin, L.E. Bailey and T.O. Passell, Phys. Rev. 114 (1959) 1110.
27. R. Groleau, S.C. Gujrathi and J.-P. Martin, Nucl. Instr. and Meth. 218 (1983) 11.
28. W. Assman, Nucl. Instr. and Meth. B 64 (1992) 267; B 89 (1994) 131.
29. W. Assman, Nucl. Instr. and Meth. B 64 (1992) 267; B 89 (1994) 131.
30. H.I. Kim, W.T. Milner and F.K. Mc Gowan, Nucl. Data Tables A 3 (1967) 123.
31. V. Gomes Porto, N. Ueta, R.A. Douglas, O. Sala, D. Wilmore, B.A. Robson and P.E. Hodgson, Nucl. Phys. A 136 (1969) 385.
32. P. Paduschek and P. Eichinger, Nucl. Instr. and Meth. 191 (1981) 75.
33. M.A. Briere, F. Wulf and D. Bräunig, Nucl. Instr. and Meth. B 45 (1990) 45.
34. P. Trocellier and Ch. Engelmann, J. Radioanal. Nucl. Chem. 100 (1986) 117.
35. W.B. Vandervorst and H.E. Maes, Spectrochim. Acta 40B (1985) 781.