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Volumn 276, Issue 1-2, 1996, Pages 88-91

Photoluminescence studies of light emission from silicon implanted and annealed SiO2 layers

d CNR (Italy)

Author keywords

Annealing; Luminescence; Silicon

Indexed keywords

ANNEALING; ION IMPLANTATION; LIGHT EMISSION; PHOTOLUMINESCENCE; SILICA; THERMAL EFFECTS;

ION FLUENCE;

POROUS SILICON;

EID: 0030122655 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(95)08050-3 Document Type: Article

Times cited : (5)

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