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Volumn 15, Issue 5, 1996, Pages 431-433
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Influences of fabrication techniques and doping on hydrogen sensitivity of zinc oxide sensors
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL SENSORS;
CHEMICAL VAPOR DEPOSITION;
ELECTRIC PROPERTIES;
ETCHING;
HYDROGEN;
POWDER METALS;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DOPING;
SHEET METAL;
SINTERING;
THIN FILMS;
CERAMIC TECHNIQUE;
CHROMIC ACID ETCHING;
DOCTOR BLADE TECHNIQUE;
HYDROGEN SENSITIVITY;
MICROSCOPE GLASS SIDES;
POST DEPOSITION AIR ANNEAL;
SODIUM ZINCATE BATH;
WET CHEMICAL TECHNIQUE;
ZINC HYDROXIDE;
ZINC OXIDE SENSORS;
SEMICONDUCTING ZINC COMPOUNDS;
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EID: 0030109856
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (24)
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References (19)
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