Fundamental gas processes for the CVD diamond growth from H2/C2H2/O2 and Ar/C2H2/O2 mixtures

Physica Status Solidi (A) Applied Research

Volumn 154, Issue 1, 1996, Pages 5-21

  Benndorf, C ^a   Schmidt, I ^a   Joeris, P ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY MIXTURES; CHEMICAL VAPOR DEPOSITION; EMISSION SPECTROSCOPY; FILM GROWTH; MASS SPECTROMETRY; METHANE; OXYGEN; RAMAN SPECTROSCOPY; REDUCTION; THERMODYNAMIC STABILITY;

DIAMOND SYNTHESIS; MICROWAVE EXCITATION; OPTICAL EMISSION SPECTROSCOPY;

DIAMOND FILMS;

EID: 0030109651     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211540103     Document Type: Article

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