SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2787-2789

Structural relaxation and stress reduction in hydrogenated silicon oxide films

(5) Takahashi, Hiroki a Nishiguchi, Akihiro a Nagata, Hirotoshi a Kataoka, Haruki a Fujishima, Masahide b

a SUMITOMO OSAKA CEMENT CO LTD (Japan)

b Found Prom Mat Sci Technol J (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FILM GROWTH; HYDROGEN; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MOLECULAR STRUCTURE; OXIDES; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; RELAXATION PROCESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRESSES;

BONDING ANGLES; ELASTIC RECOIL DETECTION; HYDROGENATED SILICON OXIDE; STRESS REDUCTION;

THICK FILMS;

EID: 0030109297 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.361111 Document Type: Article

Times cited : (4)

References (10)

1
- 0043028369
- H. Takahashi, N. Nagata, H. Kataoka, and H. Takai, J. Appl. Phys. 75, 2667 (1994).
- (1994) J. Appl. Phys. , vol.75 , pp. 2667
- Takahashi, H.¹ Nagata, N.² Kataoka, H.³ Takai, H.⁴

2
- 0028508160
- H. Takahashi, N. Nagata, and H. Kataoka, Jpn. J. Appl. Phys. 33, 4978 (1994).
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 4978
- Takahashi, H.¹ Nagata, N.² Kataoka, H.³

3
- 0024769671
- L. M. Mack and A. Reisman, J. Electrochem. Soc. 136, 3433 (1989).
- (1989) J. Electrochem. Soc. , vol.136 , pp. 3433
- Mack, L.M.¹ Reisman, A.²

4
- 3643147704
- S. V. Hattangady, R. G. Alley, G. G. Fountain, R. J. Markunas, G. Lucovsky, and D. Temple, J. Appl. Phys. 73, 7653 (1993).
- (1993) J. Appl. Phys. , vol.73 , pp. 7653
- Hattangady, S.V.¹ Alley, R.G.² Fountain, G.G.³ Markunas, R.J.⁴ Lucovsky, G.⁵ Temple, D.⁶

5
- 55049136964
- J. C. G. de Sande, C. N. Afonso, J. L. Escudero, R. Sema, F. Cataline, and E. Bernabeu, Appl. Opt. 31, 6133 (1992).
- (1992) Appl. Opt. , vol.31 , pp. 6133
- De Sande, J.C.G.¹ Afonso, C.N.² Escudero, J.L.³ Sema, R.⁴ Cataline, F.⁵ Bernabeu, E.⁶

6
- 0004198677
- Academic, New York, Chaps. 2 and 3
- HIPRA, Charles Evans & Associates Co., Ltd., presented in the technical report of Foundation for Promotion of Material Science and Technology of Japan, 1994 (in Japanese). This simulation program is based on the following reference: W.-K. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectwscopy (Academic, New York, 1989), Chaps. 2 and 3.
- (1989) Backscattering Spectwscopy
- Chu, W.-K.¹ Mayer, J.W.² Nicolet, M.A.³

7
- 85033830165
- 25-29 September Yokohama, Japan, abstract no. TFO-009
- H. Takahashi, A. Nishiguchi, H. Nagata, H. Kataoka, and M. Fujishima, presented at the 13th International Vacuum Congress 9th International Conference on Solid Surfaces, 25-29 September 1995, Yokohama, Japan, abstract no. TFO-009.
- (1995) 13th International Vacuum Congress 9th International Conference on Solid Surfaces
- Takahashi, H.¹ Nishiguchi, A.² Nagata, H.³ Kataoka, H.⁴ Fujishima, M.⁵

8
- 0020136505
- F. L. Galeener, J. Non-Cryst. Solids 49, 53 (1982); F. L. Galeener, Solid State Commun. 44, 1037 (1982).
- (1982) J. Non-Cryst. Solids , vol.49 , pp. 53
- Galeener, F.L.¹

9
- 0020136505
- F. L. Galeener, J. Non-Cryst. Solids 49, 53 (1982); F. L. Galeener, Solid State Commun. 44, 1037 (1982).
- (1037) Solid State Commun. , vol.44 , pp. 1982
- Galeener, F.L.¹

10
- 35949029886
- F. L. Galeener, Phys. Rev. B 19, 4292 (1979).
- (1979) Phys. Rev. B , vol.19 , pp. 4292
- Galeener, F.L.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.