Effects of residual gas on the plasma polymerized films

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology

Volumn 16, Issue 2, 1996, Pages 130-133

  Chen, Meng ^a   Yang, Jinji ^a   Han, Min ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA APPLICATIONS; THIN FILMS;

GLOW DISCHARGE PLASMA; LOW PRESSURE PLASMA; POLYMERIZED FILM STRUCTURE; RESIDUAL GAS;

PLASTIC FILMS;

EID: 0030108666     PISSN: 02539748     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)