Characterization of semiconducting suicide films by infrared vibrational spectroscopy

Materials Chemistry and Physics

Volumn 43, Issue 3, 1996, Pages 238-242

  Fenske, F ^a   Lange, H ^a   Oertel, G ^a   Reinsperger, G U ^a   Schumann, J ^b   Selle, B ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b IFW DRESDEN   (Germany)

Author keywords

Coevaporation; Microcrystallinity; Spectroscopy

Indexed keywords

CHARACTERIZATION; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; EVAPORATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; LASER ABLATION; MOLECULAR BEAM EPITAXY; PHONONS; SEMICONDUCTING SILICON COMPOUNDS; SINGLE CRYSTALS; SPUTTERING;

COEVAPORATION; INFRARED VIBRATIONAL SPECTROSCOPY; MICROCRYSTALLINITY; SEMICONDUCTING SILICIDES;

SEMICONDUCTING FILMS;

EID: 0030108211     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/0254-0584(95)01643-9     Document Type: Article

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