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Volumn , Issue 109, 1996, Pages 39-45
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Application of a mobile clean robot to semiconductor fabrication
a
a
HITACHI LTD
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
CLEANLINESS LEVEL;
HIGH SPEED OPERATION CAPABILITY;
MOBILE CLEAN ROBOT;
PASSIVE ACTIVE VIBRATION ISOLATION;
TRICYCLE CONFIGURATION;
WAFER CASSETTES;
CLEAN ROOMS;
COMPUTER VISION;
DEGREES OF FREEDOM (MECHANICS);
ELECTRIC POWER SUPPLIES TO APPARATUS;
FACTORY AUTOMATION;
FLEXIBLE MANUFACTURING SYSTEMS;
MANEUVERABILITY;
PRODUCTION CONTROL;
ROBOTIC ARMS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON WAFERS;
WHEELS;
MOBILE ROBOTS;
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EID: 0030107869
PISSN: 03871940
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (2)
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References (4)
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