In-situ electron microscopy studies of hot filament chemical vapour deposition diamond thin film growth in an environmental SEM

Physica Status Solidi (A) Applied Research

Volumn 154, Issue 1, 1996, Pages 43-54

  Charyshkin, E ^a   Kinaev, N N ^b   Waterworth, M ^a   Cousens, D R ^b   Calos, N ^b   Bostrom, T ^a   Ilyushechkin, A ^b  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

^b UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; IN SITU ELECTRON MICROSCOPY; PRESSURE LIMITING APERTURE;

CHEMICAL VAPOR DEPOSITION; ELECTRON DIFFRACTION; FILM GROWTH; IN SITU PROCESSING; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIAMOND FILMS;

EID: 0030107844     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211540106     Document Type: Article

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