Characterization of PTFE on silicon wafer tribological transfer films by XPS, imaging XPS and AFM

Surface and Interface Analysis

Volumn 24, Issue 3, 1996, Pages 204-210

  Beamson, G ^a   Clark, D T ^a   Deegan, D E ^b   Hayes, N W ^a   Law, D S L ^a   Rasmusson, J R ^c   Salaneck, W R ^c  

^a DARESBURY LABORATORY   (United Kingdom)

^b UNIVERSITY OF SURREY   (United Kingdom)

^c LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; DEPOSITION; IMAGE ANALYSIS; MOLECULAR STRUCTURE; PRESSURE EFFECTS; SILICON WAFERS; SURFACE PROPERTIES; THERMAL EFFECTS; THIN FILMS; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

EPITAXIAL CRYSTALLIZATION; MOLECULAR CHAINS; TRIBOLOGICAL TRANSFER FILMS;

POLYTETRAFLUOROETHYLENES;

EID: 0030107674     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199603)24:3<204::AID-SIA90>3.0.CO;2-C     Document Type: Article

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