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Volumn 108, Issue 4, 1996, Pages 367-370
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15N(d,α0)13c cross section and angular distribution measurements for ion beam analysis
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
CHEMICAL VAPOR DEPOSITION;
DEUTERIUM;
ION BOMBARDMENT;
ISOTOPES;
MEASUREMENTS;
NITROGEN;
NUCLEAR PHYSICS;
SILICON NITRIDE;
AREAL DENSITIES;
DEUTERON ENERGIES;
ION BEAM ANALYSIS;
SHALLOW DEPTH PROFILES;
ION BEAMS;
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EID: 0030106424
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/0168-583X(95)01165-X Document Type: Article |
Times cited : (4)
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References (12)
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