Space filling by nucleation and growth in chemical vapor deposition of diamond

Journal of Materials Research

Volumn 11, Issue 3, 1996, Pages 716-726

  Stiegler, J ^a   Von Kaenel, Y ^a   Cans, M ^a   Blank, E ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DEPOSITION; FILM GROWTH; NUCLEATION;

DIAMOND DEPOSITION;

DIAMOND FILMS;

EID: 0030106198     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1996.0086     Document Type: Article

References (22)

1. S. S. Eskildsen, in 2nd Int. Conf. on the Applic. of Diamond Films and Relat. Mater., edited by M. Yoshikawa, M. Murakawa, Y. Tzeng, and W. A. Yarbrough (Tokyo, 1993), P. 297.
2. S. lijima, Y. Aikawa, and K. Baba, J. Mater. Res. 6, 1491 (1991).
3. H. Maeda, S. Ikari, T. Okubo, K. Kusakabe, and S. Morooka, J. Mater. Sci. 28, 129 (1993).
4. P. A. Denning and D. A. Stevenson, Appl. Phys. Lett. 59, 1562 (1991).
5. Y. Avigal, Diamond Relat. Mater. 1, 216 (1992).
6. J. W. Kim, Y-J. Baik, and K. Y. Eun, Diamond Relat. Mater. 1, 200 (1992).
7. M. Tomellini, R. Polini, and V. Sessa, J. Appl. Phys. 70, 7573 (1991).
8. E. Molinari, R. Polini, M. L. Terranova, P. Ascarelli, and S. Fontana, J. Mater. Res. 7, 1778 (1992).
9. E. Molinari, R. Polini, V. Sessa, M. L. Terranova, and M. Tomellini, J. Mater. Res. 8, 785 (1993).
10. M. Tomellini, J. Appl. Phys. 72, 1589 (1992).
11. M. Avrami, J. Chem. Phys. 7, 1103 (1939); J. Chem. Phys. 8, 212 (1940).
12. M. Avrami, J. Chem. Phys. 7, 1103 (1939); J. Chem. Phys. 8, 212 (1940).
13. W. Johnson and R. Mehl, Trans AIME 135, 416 (1939).
14. B. S. Mathis and A. M. Bonnot, Diamond Relat. Mater. 2, 718 (1993).
15. Y. von Kaenel, J. Stiegler, and E. Blank, Diamond Relat. Maier. 4, 972 (1995).
16. M. Cans, J. Stiegler, and E. Blank, unpublished.
17. N. Jiang, B. W. Sun, Z. Zhang, and Z. Lin, J. Mater. Res. 9, 2695 (1994).
18. R. A. Bauer, N. M. Sbrockey, and W. E. Brower, Jr., J. Mater, Res. 8, 2858 (1993).
19. P. Ascarelli and S. Fontana, Diamond Relat. Mater. 2, 990 (1993).
20. P. O. Joffreau, R. Haubner, and B. Lux, in Extended Abstracts No. 15, Diamond and Diamond-Like Materials Synthesis, edited by G. H. Johnson, A. R. Badzian, and M. W. Geis (Materials Research Society, Pittsburgh, PA. 1988), p. 15.
21. R. Haubner, A. Lindlbauer, and B. Lux, Diamond Relat. Mater. 2, 1505 (1993).
22. D. Kweon and J. Z. Lee, J. Appl. Phys. 69, 4272 (1990).