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Volumn 62, Issue 3, 1996, Pages 241-247
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Operation of KrF and ArF tunable excimer lasers without Cassegrain optics
a,b,c a,b c b,d |
Author keywords
[No Author keywords available]
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Indexed keywords
FLUORINE COMPOUNDS;
LASER BEAMS;
LASER MODE LOCKING;
LASER PULSES;
LASER TUNING;
LIGHT AMPLIFIERS;
LIGHT POLARIZATION;
OSCILLATORS (ELECTRONIC);
RADIATION;
ARGON FLUORIDE;
BEAM DIVERGENCE;
CASSEGRAIN OPTICS;
KRYPTON FLUORIDE;
LAMBDA PHYSIK TUNABLE LASERS;
LOCKING EFFICIENCY;
SINGLE PASS CONFIGURATION;
TRIPLE PASS CONFIGURATION;
EXCIMER LASERS;
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EID: 0030105505
PISSN: 09462171
EISSN: None
Source Type: Journal
DOI: 10.1007/BF01080951 Document Type: Article |
Times cited : (25)
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References (12)
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