Nanocluster formation by spin coating: Quantitative atomic force microscopy and Rutherford backscattering spectrometry analysis

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 585-592

  Partridge, A ^a   Toussaint, S L G ^a   Flipse, C F J ^a   Van IJzendoorn, L J ^a   Van Den Oetelaar, L C A ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CATALYSIS; CATALYSTS; COATING TECHNIQUES; HYDRODYNAMICS; MATHEMATICAL MODELS; METALS; NUMERICAL METHODS; PARTICLE SIZE ANALYSIS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY; THREE DIMENSIONAL;

COPPER ACETATE PRECURSOR; HYDRODYNAMIC DEPOSITION EQUATIONS; NANOCLUSTER FORMATION; NANOMETER SIZED METAL CLUSTERS; PARTICLE HEIGHTS; PARTICLE NUMBER DENSITY; SPIN COATING;

NANOSTRUCTURED MATERIALS;

EID: 0030104970     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589140     Document Type: Article

References (32)

1. F. H. Ribeiro and G. A. Somorjai, Rec. Trav. Chim des Pays-Bas 113/10, 419 (1994).
2. E. W. Kuipers, C. Laszlo, and W. Wieldraaijer, Catal. Lett. 17, 71 (1993).
3. W. A. de Heer, W. D. Knight, M. Y. Chou, and M. Cohen, Solid State Phys. 40, 93 (1987).
4. J. Jortner, Z. Phys. D 24, 247 (1992).
5. F. Liu, S. N. Khana, and P. Jena, Phys. Rev. B 43, 8179 (1991); K. Lee and J. Callaway, Phys. Rev. B 48, 15358 (1991).
6. F. Liu, S. N. Khana, and P. Jena, Phys. Rev. B 43, 8179 (1991); K. Lee and J. Callaway, Phys. Rev. B 48, 15358 (1991).
7. B. V. Reddy, S. N. Khana, and B. L. Dunlap, Phys. Rev. Lett. 70, 3323 (1993).
8. A. J. Cox, J. G. Louderback, and L. A. Bloomfield, Phys. Rev. Lett. 71, 923 (1993); A. J. Cox, J. G. Louderback, S. E. Aspel, and L. A. Bloomfield, Phys. Rev. B 49, 12295 (1994).
9. A. J. Cox, J. G. Louderback, and L. A. Bloomfield, Phys. Rev. Lett. 71, 923 (1993); A. J. Cox, J. G. Louderback, S. E. Aspel, and L. A. Bloomfield, Phys. Rev. B 49, 12295 (1994).
10. For a review of recent developments see Forces in Scanning Probe Methods, edited by H.-J. Guntherodt, D. Anselmetti, and E. Meyer, NATO ASI series E, Vol. 286 (Kluwer, Dordrecht, 1994).
11. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986); G. Binnig, Ch. Gerber, E. Stoll, T. R. Albrecht, and C. F. Quate, Europhys. Lett. 3, 1281 (1987).
12. G. Binnig, C. F. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986); G. Binnig, Ch. Gerber, E. Stoll, T. R. Albrecht, and C. F. Quate, Europhys. Lett. 3, 1281 (1987).
13. G. Beitel, K. Markert, J. Wiechers, J. Hrbek, and R. J. Behm, Adsorption on Ordered Surfaces of Ionic Solids and Thin Films, edited by E. Umbach and H.-J. Freund (Springer, Heidelberg, 1993), Vol. 33.
14. F. Ohnesorge and G. Binning, Science 260, 1451 (1993).
15. F. J. Giessibl, Science 267, 68 (1995).
16. D. M. Schaefer, A. Ramachandra, R. P. Andres, and R. Reifenberger, Z. Phys. D 26, 249 (1993); W. Mahoney, D. M. Schaefer, A. Patil, R. P. Andres, and R. Reifenberger, Surf. Sci. 316, 383 (1994).
17. D. M. Schaefer, A. Ramachandra, R. P. Andres, and R. Reifenberger, Z. Phys. D 26, 249 (1993); W. Mahoney, D. M. Schaefer, A. Patil, R. P. Andres, and R. Reifenberger, Surf. Sci. 316, 383 (1994).
18. N. W. Cant, B. Sexton, D. L. Trimm, and M. S. Wainwright, Surface Science: Principles and Applications, Springer Proceedings in Physics 73 edited by R. F. Howe, R. N. Lamb, and K. Wandelt (Springer, Heidelberg, 1993) and references therein.
19. A. G. Emslie, F. T. Bonner, and L. G. Peck, J. Appl. Phys. 29, 858 (1958).
20. D. Meyerhofer, J. Appl. Phys. 49, 3993 (1978).
21. C. Doornkamp, C. Laszlo, W. Wieldraaijer, and E. W. Kuipers, J. Mater. Res. 10, 411 (1995).
22. R. M. van Hardeveld, Internal Report, Dept. of Chemistry, Tech. Univ. of Eindhoven (1993); R. M. van Hardeveld, P. L. J. Gunter, L. J. van IJzendoorn, W. Wieldraaijer, E. W. Kuipers and J. W. Niemantsverdriet, Appl. Surf. Sci. 84, 339 (1995).
23. R. M. van Hardeveld, Internal Report, Dept. of Chemistry, Tech. Univ. of Eindhoven (1993); R. M. van Hardeveld, P. L. J. Gunter, L. J. van IJzendoorn, W. Wieldraaijer, E. W. Kuipers and J. W. Niemantsverdriet, Appl. Surf. Sci. 84, 339 (1995).
24. A. Partridge, S. L. G. Toussaint, and C. F. J. Flipse, Appl. Surf. Sci. (submitted).
25. Nanoscope, Digital Instruments, 520 E. Montecito St., Santa Barbara, CA.
26. S. S. Sheiko, M. Moller, E. M. C. M. Revuekamp, and H. W. Zandbergen, Phys. Rev. B 48, 5675 (1993).
27. L. R. Doolittle, Nucl. Instrum. Methods B 9, 344 (1985).
28. M. Bozoian, Nucl. Instrum. Methods B 58, 127 (1991).
29. M. A. Kohler, H. E. Curry-Hyde, A. E. Hughes, B. A. Sexton, and N. W. Cant, J. Catal. 108, 323 (1987).
30. X. Xu, Jian-Wei He, and D. W. Goodman, Surf. Sci. 284, 103 (1993).
31. J. W. Niemantsverdriet, Spectroscopy in Catalysis: An Introduction (VCH, Weinheim, 1993).
32. H. J. Borg, L. C. A. van den Oetelaar, L. J. van Ijzendoorn, and J. W. Niemandsverdriet, J. Vac. Sci. Technol. A 10, 2737 (1992).