Studies on super-smooth polishing (2nd report) - Deconvolution algorithm for corrective polishing

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 62, Issue 3, 1996, Pages 408-412

  Negishi, Mahito ^a   Ando, Manabu ^a   Takimoto, Masahumi ^a   Deguchi, Akinobu ^a   Nakamura, Nobuo ^a  

^a NONE

Author keywords

Algorithm; Aspherical optics; Calculation time; Computer controlled polishing; Convolution model; Corrective polishing; Deconvolution; Dwell time control; Fast Fourier Transformation; Residual error

Indexed keywords

ALGORITHMS; COMPUTER CONTROL; COMPUTER SIMULATION; CONTOUR MEASUREMENT; ERROR ANALYSIS; FAST FOURIER TRANSFORMS; FREQUENCY DOMAIN ANALYSIS; FREQUENCY RESPONSE; LOW PASS FILTERS; MATHEMATICAL MODELS; OPTICS; OPTIMIZATION;

ASPHERICAL OPTICS; CALCULATION TIME; CANON SUPER SMOOTH POLISHER; CONVOLUTION MODEL; CORRECTIVE POLISHING; DECONVOLUTION; DWELL TIME CONTROL; RESIDUAL ERROR;

POLISHING;

EID: 0030104616     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.62.408     Document Type: Article

References (9)

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