Influence of different carbon structures on diamond synthesis by chemical vapour deposition

Physica Status Solidi (A) Applied Research

Volumn 154, Issue 1, 1996, Pages 127-140

  Terranova, M L ^a   Rossi, M ^b   Sessa, V ^a   Vitali, G ^b  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

^b SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; FUSED SILICA; IRRADIATION; PULSED LASER APPLICATIONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SUBSTRATES; SYNTHESIS (CHEMICAL); TITANIUM;

DIAMOND SYNTHESIS; GLASSY CARBON; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; PULSED RUBY LASER IRRADIATION;

DIAMOND FILMS;

EID: 0030104424     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211540111     Document Type: Article

References (70)

1. D. N. BELTON and S. J. SCHMIEG, J. appl. Phys. 66, 4223 (1989).
2. G.-H. M. MA, Y. H. LEE, and J. T. GLASS, J. Mater. Res. 5, 2367 (1990).
3. C. TSAI, W. GEUBERICH, Z. P. LU, J. HEBERLRIN, and E. PFENDER, J. Mater. Res. 6, 2127 (1991).
4. T. P. ONG, F. L. XIONG, and R. P. H. CHANG, Appl. Phys. Letters 60, 2083 (1992).
5. M. M. WAITE and S. I. SHAH, Appl. Phys. Letters 60, 2344 (1992).
6. C. P. SUNG and H. C. SHIH, J. Mater. Res. 7, 105 (1992).
7. P. BOU, L. VANDEBULCKE, R. HERBIN, and F. HILLION, J. Mater. Res. 7, 2151 (1992).
8. V. P. GODBOLE and J. NARAYAN, J. Mater. Res. 7, 2785 (1992).
9. J. NARAJAN, V. P. GODBOLE, G. MATERA, and R. K. SINGH, J. appl. Phys. 71, 966 (1992).
10. R. HAUBNER and B. LUX, in: Diamond Materials, Ed. J. P. DISMUKES and K. V. RAVI, The Electrochemical Society, Pennington/New York 1993 (p. 198).
11. P. A. DENNING, R. B. DANDLIKER, D. KOUZMINOV, A. F. MARSHALL, and D. A. STEVENSON, ibid. (p. 310).
12. J. P. FALLON and L. M. BROWN, Diamond relat. Mater. 1, 1004 (1993).
13. W. ZHU, C. A. RANDALL, A. R. BADZIAN, and R. MESSIER, J. Vacuum Sci. Technol. 7, 2315 (1993).
14. R. STÖCKEL, R. GRAUPNER, K. JANISCHOWSKY, S. XU, J. RISTEIN, M. HUNDHAUSEN, and L. LEY, Diamond relat. Mater. 2, 1467 (1993).
15. J. GIERE, M. C. POLO, and J. ESTEVE, in: Applications of Diamond Films and Related Materials, Ed. M. YOSHIKAWA, M. MURAKAWA, Y. TZENG, and W. A. YARBROUGH, MYU, Tokyo 1993 (p. 685).
16. M. MURAKAWA, Y. TZENG, and W. A. YARBOROUGH, ibid. (p. 537).
17. S. S. PERRY, J. W. AGER III, G. SOMORJAI, R. J. MCLELLAND, and M. D. DRORY, J. appl. Phys. 74, 7542 (1993).
18. Y. TZOU, J. BRULEY, F. ERNST, M. RÜHLE, and R. RAJ, J. Mater. Res. 9, 1566 (1994).
19. O. S. CHIA, C. M. YOUNES, P. G. PARTRIDGE, G. C. ALLEN, P. W. MAY, and C. A. REGO, J. Mater. Sci. 29, 6397 (1994).
20. N. JIANG, B. W. SUN, Z. ZHANG, and Z. LIN, J. Mater. Res. 9, 2695 (1994).
21. T. HARTNETT, R. MILLER, D. MONTANARI, C. WILLINGHAM, and R. TUSTISON, J. Vacuum Sci. Technol. A 8, 2129 (1990).
22. K. V. RAVI and C. A. KOCH, Appl. Phys. Letters 57, 348 (1990).
23. K. V. RAVI, C. A. KOCH, H. S. HU, and A. JOSHI, J. Mater. Res. 5, 2356 (1990).
24. M. HAM and K. A. Lou, J. Vacuum Sci. Technol. A 8, 2143 (1990).
25. E. MOROTTA, N. BAKHHU, A. GILL, V. PATEL, and B. MEYERSON, Thin Solid Films 206, 188 (1991).
26. J. ANGUS, Z. LI, N. SUNKARA, R. GAT, A. ANDERSON, S. MEHANDRU, and M. GEIS, in: Diamond Materials, Ed. A. J. PURUES, J. C. ANGUS, R. F. DAVIS, B. M. MEYERSON, K. E. SPEAK, and M. YODER, Vol. 91-8, The Electrochemical Society, Pennington/New York 1991 (p. 266).
27. R. A. RUDDER, G. C. HUDSON, R. C. HENDHY, R. E. THOMAS, J. B. POSTHILL, and R. J. MARKUNAS, in: Applications of Diamond Films and Related Materials, Ed. Y. TZENG, M. YOSHIKAWA, M. MURAKAWA, and A. FELDMAN, Elsevier Publ. Co., Amsterdam 1991 (p. 395).
28. R. J. MEILUNAS, R. P. G. CHANG, S. LIU, and M. M. KAPPES, Appl. Phys. Letters 59, 3461 (1991).
29. A. A. MORRISH and P. E. PEHRSSON, Appl. Phys. Letters 59, 417 (1991).
30. J. J. DUBRAY, G. C. PANTANO, M. MELONCELLI, and E. BERTRAN, J. Vacuum Sci. Technol. A 9, 3012 (1991).
31. S. M. KANETKAR, G. MATERA, X. K. CHEN, S. PRAMANIK, P. TIWARI, J. NARAJAN, G. PFEIFFER, and M. PAESLER, J. electronic Mater. 20, 141 (1991).
32. P. E. PEHRSSON, J. GLESENER, and A. MORRISH, Thin Solid Films 212, 81 (1992).
33. J. J. DUBRAY, G. C. PANTANO, and W. A. YARBOROUGH, J. appl. Phys. 72, 3136 (1992).
34. W. A. YARBOROUGH, J. Amer. Ceram. Soc. 75, 3179 (1992).
35. B. R. STONER, G.-H, M. MA, S. D. WOLTER, and J, T. GLASS, Phys. Rev. B 45, 11067 (1992).
36. W. R. LAMHRECHT, C. H. LEE, B. SEGALL, J. C. ANGUS, Z. LI, and M. SUNKAHA, Nature (London) 364, 607 (1993).
37. J. C. ANGUS, Proc. ACS Diamond Meeting Spring, Washington (DC) 1990 (p. 35).
38. Z. LI, L. WANG, T. SUZUKI, P. PIROUZ, and J. D. ANGUS, J. appl. Phys. 73, 711 (1993).
39. E. JOHANSSON, A.-S. NOREKRANS, and J.-O. CARLSSON, Diamond relat. Mater. 2, 383 (1993).
40. M. D. DRORY, R. J. MCLELLAND, F. W. ZOK, and F. E. HEREDIA, J. Amer. Ceram. Soc. 76, 1387 (1993).
41. F. X. LU, J. J. WANG, B. X. YANG, J. CHEN, and B. SONG, see [15] (p. 731).
42. S. P. MCGINNIS, M. A. KELLY, T. M. GÜR, and S. HAGSTRÖM, see [10] (p. 153).
43. Z. FENG, K. KOMVOPOULOS, I. G. BROWN, and D. B. BOGY, J. appl. Phys. 74, 2841 (1993).
44. K. KOBAYASHI, T. NAKANO, N. MUTSUKURA, and Y. MACHI, Vacuum 44, 1 (1993).
45. P. N. BARNES and R. L. C. WU, Appl. Phys. Letters 62, 37 (1993).
46. J. TING and M. L. LAKE, J. Mater. Res. 9, 636 (1994).
47. K. L. MENNINGEN, M. A. CHILDS, H. TOYODA, L. W. ANDERSON, and J. E. LAWLER, J. Mater. Res. 9, 915 (1994).
48. Y. NAKAMURA, K. TAMAKI, Y. WATANABE, and S. HIRAYAMA, J. Mater. Res. 9, 1619 (1994).
49. Z. FENG, K. KOMVOPOULOS, I. G. BROWN, and D. B. BOGY, J. Mater. Res. 9, 2148 (1994).
50. R. J. MEILUNAS and R. P. H. CHANG, J. Mater. Res. 9, 61 (1994).
51. P. C. YANG, W. ZHU, and J. T. GLASS, J. Mater. Res. 9, 1063 (1994).
52. X. L. PENG, J. Mater. Res. 9, 1573 (1994).
53. Z. FENG, M. A. BREWER, K. KOMVOPOULOS, I. G. BROWN, and D. B. BOGY, J. Mater. Res. 10, 165 (1995).
54. K. TAMAKI, Y. NAKAMURA, Y. WATANABE, and S. HIRAYAMA, J. Mater. Res. 10, 431 (1995).
55. G. VITALI, Japan. J. appl. Phys. 31, 2049 (1992).
56. M. L. TERRANOVA, R. POLINI, V. SESSA, M. BRAGLIA, and G. COCITO, Diamond relat. Mater. 1, 969 (1992).
57. G. M. JENKINS and K. KAWAMURA, Nature (London) 231, 175 (1971).
58. G. M. JENKINS, K. KAWAMURA, and L. L. BAN, Proc. Roy. Soc. (London) A 327, 501 (1972).
59. M. L. TERRANOVA, M. ROSSI, V. SESSA, and G. VITALI, Thin Solid Films 241, 340 (1994).
60. M. L. TERRANOVA, V. SESSA, M. ROSSI, G. VITALI, G. CAPPUCCIO, and C. VEROLI, J. Physique (IV) 5, C5-879 (1995).
61. G. VITALI, M. ROSSI, M. L. TERRANOVA, and V. SESSA, J. appl. Phys. 77, 4307 (1995).
62. M. L. TERRANOVA, M. ROSSI, V. SESSA, and G. VITALI, to be published.
63. E. VIETZKE, V. PHILIPPS, F. FLASKAMP, P. KOIDL, and CH. WILD, Surface Coatings Technol. 47, 156 (1991).
64. C. B. COLLINS, F. DAVANLOO, D. R. JANDER, T. J. LEE, H. PARK, and J. H. YOU, J. appl. Phys. 69, 7862 (1991).
65. A. R. BADZIAN and R. C. DEVRIES, Mater. Res. Bull. 23, 385 (1988).
66. A. R. BADZIAN and T. BADZIAN, in: Diamond and Diamond-like Materials Synthesis, Ed. G. H. JOHNSON, A. R. BADZIAN, and M. W. GEIS, Mater. Res. Soc., Pittsburgh (PA) 1988 (p. 27).
67. P. PAROLI, private communication.
68. M. L. TERRANOVA, M. ROSSI, V. SESSA, and G. VITALI, Solid State Commun. 91, 55 (1994).
69. Diffraction Database by International Centre for Diffraction Data, Sandia National Laboratories, 1993.
70. M. ROSSI, G. VITALI, M. L. TERRANOVA, and V. SESSA, Appl. Phys. Letters 63, 2765 (1993).