Structural characterization of CVD diamond films using the ESR method

Thin Solid Films

Volumn 274, Issue 1-2, 1996, Pages 50-54

  Show, Yoshiyuki ^a   Iwase, Mitsuo ^a   Izumi, Tomio ^a  

^a TOKAI UNIVERSITY   (Japan)

Author keywords

Chemical vapour deposition; Diamond; Electron spin resonance; Surface conductivity

Indexed keywords

CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRIC RESISTANCE; HEAT TREATMENT; HYDRIDES; PARAMAGNETIC RESONANCE; POWDERS; RAMAN SPECTROSCOPY; STRUCTURE (COMPOSITION); SUBSTRATES; SURFACE PROPERTIES;

DEFECT CENTER; GROWTH TIME; NON DIAMOND PHASE CARBON; STRUCTURAL CHARACTERIZATION; SURFACE CONDUCTIVITY;

DIAMOND FILMS;

EID: 0030103544     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)07097-4     Document Type: Article

References (23)

1. J.E. Field, The Properties of Diamond, Academic Press, New York, 1979.
2. J.F. Prins, Appl. Phys. Lett., 41 (1982) 950.
3. M.W. Geis, D.D. Rathman, D.J. Ehrlich, R.A. Murphy and W.T. Lindley, IEEE Electron. Device Lett., 5(1987) 341.
4. H. Shiomi, H. Nakahata, T. Imai, Y. Nishibayashi and N. Fujimori, Jpn. J. Appl. Phys., 28 (1989) 758.
5. H. Shiomi, Y. Nishibayashi and N. Fujimori, Jpn. J. Appl. Phys., 28 (1989) L2153.
6. K. Kobashi, K. Nishimura, Y. Kawate and T. Horiuchi, Phys. Rev., B38 (1988) 4067.
7. C.F. Chen, T.M. Hong and S.H. Chen, J. Appl. Phys., 74 (1993) 4483.
8. J. Narayan and A.R. Srivatsa, Appl. Phys. Lett., 53 (1988) 1823.
9. B.E. Williams and J.T. Glass, J. Mater. Res., 4 (1989) 373.
10. Y. Mon, Y. Show, M. Deguchi, H. Yagi, H. Yagyu, N. Eimori, T. Okada, A. Hatta, K. Nishimura, M. Kitabatake, T. Ito, T. Hirao, T. Izumi, T. Sasaki and A. Hiraki, Jpn. J. Appl. Phys., 32 (1993) L987.
11. I. Watanabe and K. Sugata, Jpn. J. Appl. Phys., 27 (1988) 1808.
12. M. Teicher and R. Beserman, J. Appl. Phys., 53 (1982) 1467.
13. J.A. van Wyk and J.H.N. Loubser, J. Phys., C16 (1983) 1501.
14. M.V. Vlasova and N.G. Kakazei, Solid State Commun., 47 (1983) 255.
15. Z. Guo-Liang, Y. Hong and S. Nmei-Ning, Radiat. Effects, 97 (1986) 273.
16. B.P. Singh, S.K. Gupta, U. Dhawan and K. Lal, J. Mater. Sci., 25 (1990) 1487.
17. Y. Show, Y. Nakamura, T. Izumi, M. Deguchi, M. Kitabatake, T. Hirao, Y. Mori, A. Hatta, T. Ito and A. Hiraki, Proc. Top. Symp. II on New Diamond and Diamond-like Films of the 8th CIMTEC, World Ceramics Congress and Forum on New Materials, Florence, 1994, p. 267.
18. S.A. Solin and A.K. Ramdas, Phys. Rev., B1 (1970) 1687.
19. F. Tuinstra and J.L. Koenig, J. Chem. Phys., 53 (1970) 1126.
20. S.A. Grot, G.S. Gildenblat, C.W. Hatfield, C.R. Wronski, A.R. Badzian, T. Badzian and R. Messier, IEEE Electron. Device Lett., 11 (1990) 100.
21. H. Nakahata, T. Imai and N. Fujimori, Proc. 2nd Int. Symp. on Diamond Materials, Washington, D.C., 1991, p. 487.
22. M. Deguchi, Y. Mori, N. Eimori, Y. Show, M. Kitabatake, A. Hatta, T. Ito, A. Hiraki, T. Izumi and T. Hirao, Proc. 2nd Int. Conf. on the Application of Diamond Films and Related Materials, Omiya, 1993, p. 793.
23. K. Miyataand D.L. Dreifus, Jpn. J. Appl. Phys., 33 (1994) 4526.