Synchrotron radiation-stimulated semiconductor process and new prospects of core electron excitation photochemistry

Optoelectronics - Devices and Technologies

Volumn 11, Issue 1, 1996, Pages 57-70

  Urisu, Tsuneo ^a   Yoshigoe, Akitaka ^a   Imaizumi, Yoshiaki ^a  

^a INSTITUTE FOR MOLECULAR SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMS; ELECTRONS; HYDRIDES; MOLECULAR BEAM EPITAXY; MOLECULES; PHOTOCHEMICAL REACTIONS; RADIATION EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE PHENOMENA; X RAY PHOTOELECTRON SPECTROSCOPY;

CORE ELECTRON EXCITATION; INFRARED REFLECTION ABSORPTION SPECTROSCOPY; SURFACE PHOTOCHEMICAL REACTIONS; SYNCHROTRON RADIATION STIMULATED SURFACE PROCESSES;

SYNCHROTRON RADIATION;

EID: 0030102213     PISSN: 09125434     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (52)