Vibration control for precision manufacturing using piezoelectric actuators

Journal of Intelligent Material Systems and Structures

Volumn 7, Issue 2, 1996, Pages 182-191

  Martinez, David R ^a   Hinnerichs, Terry D ^a   Redmond, James M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONTROL SYSTEMS; CUTTING; DAMPING; DYNAMIC RESPONSE; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; PRECISION ENGINEERING; VIBRATION CONTROL;

CANTILEVERED BAR; PHOTOLITHOGRAPHY PLATEN; PIEZOELECTRIC ACTUATORS; RIGID BODY STEPPING; SPINDLE;

ACTUATORS;

EID: 0030100554     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1177/1045389X9600700210     Document Type: Article

References (22)

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