Fluorinated polyimides for interlayer dielectric applications: Tailoring of properties via copolymerization

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 37, Issue 1, 1996, Pages 142-143

  Auman, Brian C ^a   McKerrow, Andrew J ^b   Leu, Jihperng ^c   Ho, Paul S ^b  

^a DUPONT COMPANY   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^c SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; COPOLYMERIZATION; DIELECTRIC MATERIALS; FLUORINE CONTAINING POLYMERS; GLASS TRANSITION; MONOMERS; PERMITTIVITY; SILICON; THERMAL EXPANSION; THERMAL STRESS; THERMODYNAMIC STABILITY;

FLUORINATED POLYIMIDES; INTERLAYER DIELECTRICS (ILD);

POLYIMIDES;

EID: 0030092277     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)

1. B. C. Auman in "Advances in Polyimide Science and Technology ", C. Feger, M. Khojasteh, and M. Htoo, Eds., Technomic Publishing, Lancaster, PA, p. 15 (1993)
2. A. E. Feiring, B. C. Auman, and E. R. Wonchoba, Macromolecules, 26, 2779 (1993), Polym. Prepr., 34(1), 393 (1993)
3. A. E. Feiring, B. C. Auman, and E. R. Wonchoba, Macromolecules, 26, 2779 (1993), Polym. Prepr., 34(1), 393 (1993)
4. B. C. Auman, Mater. Res. Soc. Proc., 337 (1994)
5. B. C. Auman, Mater. Res. Soc. Proc., 381 (1995)
6. C. R. Moylan, M. E. Best, M. Ree, J. Polym. Sci., Polym. Phys. Ed., 29, 87 (1991).
7. J. C. Coburn, P. D. Soper and B. C. Auman, Macromolecules, 28, 3253 (1995).